Hua Yu

Laser-induced damage of multilayer high-reflectance coatings for 248 nm

Dawei Li, Jianda Shao, Kui Yi, 2007, SPIE Laser Damage.

Use of melting inorganic photoresist for microlens array fabrication

Changtai Yu, Ying Chen, Fengzhen Guo, 1998, Advanced Lithography.

Method of microlens array fabricated by inorganic photoresist

Changtai Yu, Ying Chen, Hong Zhang, 2000, SPIE Optics + Photonics.

Composition of inorganic photoresists and its EBE experiment

Changtai Yu, Xiangdong Yu, Li Peng, 1993, Advanced Lithography.

Research on ultrahigh resolution of inorganic photoresist film

Changtai Yu, Xiangdong Yu, Fengzhen Guo, 1994, Advanced Lithography.