Andreas Gondorf

A multi-step wafer-level run-to-run controller with sampled measurements for furnace deposition and CMP process flows: APC: Advanced process control

Yulei Sun, Joerg Reichelt, Tilo Bormann, 2016, 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).

Silicon nanoparticles: Absorption, emission, and the nature of the electronic bandgap

Stephan Lüttjohann, Axel Lorke, Cedrik Meier, 2007 .