Toshiyuki Yoshimura

发表

Nanometer-level metrology with a low-voltage CD SEM

Tsuneo Terasawa, Jiro Yamamoto, Hideo Todokoro, 1998, Advanced Lithography.

Sprinkler nozzle for flexible hose

Toshiyuki Yoshimura, Mitsutake Sumitani, Wataru Takeshita, 1995 .

Nanometer Electron Beam Lithography with Azide-Phenolic Resin Resist Systems

Takashi Hattori, Fumio Murai, Shou-ichi Uchino, 1996 .

PRISM: Process for resist profile improvement with surface modification

Fumio Murai, Shinji Okazaki, Hiroshi Shiraishi, 1988 .

Acid‐diffusion effect on nanofabrication in chemical amplification resist

Shinji Okazaki, Toshiyuki Yoshimura, Yoshinori Nakayama, 1992 .

Nanometer-Scale Imaging Characteristics of Novolak Resin-Based Chemical Amplification Negative Resist Systems and Molecular-Weight Distribution Effects of the Resin Matrix

Shinji Okazaki, Toshio Sakamizu, Hiroshi Shiraishi, 1994 .

Suppression of Acid Diffusion in Chemical Amplification Resists by Molecular Control of Base Matrix Polymers

Shinji Okazaki, Hiroshi Shiraishi, Toshiyuki Yoshimura, 1995 .

Accurate critical dimension control by using an azide/novolak resist process for electron-beam lithography

Fumio Murai, Hiroya Ohta, Shou-ichi Uchino, 1997 .

Effects of Molecular-Weight Distributions of Resist Polymers and Process Control on Lithography for 0.1μm and Below

Tsuneo Terasawa, Shinji Okazaki, Hiroshi Shiraishi, 1997 .

0.1 mu m CMOS devices using low-impurity-channel transistors (LICT)

Shinji Okazaki, Tokuo Kure, Katsuhiro Shimohigashi, 1990, International Technical Digest on Electron Devices.

Nano edge roughness in polymer resist patterns

Shinji Okazaki, Hiroshi Shiraishi, Toshiyuki Yoshimura, 1993 .

Correlation of Nano Edge Roughness in Resist Patterns with Base Polymers

Shinji Okazaki, Hiroshi Shiraishi, Toshiyuki Yoshimura, 1993 .

Acid‐diffusion suppression in chemical amplification resists by controlling acid‐diffusion channels in base matrix polymers

Tsuneo Terasawa, Shinji Okazaki, Hiroshi Shiraishi, 1996 .

Magnetic nanoparticle array with perpendicular crystal magnetic anisotropy

Masayoshi Ishibashi, Yoshiyuki Hirayama, Toshiyuki Yoshimura, 1999 .