S. Sohail H. Naqvi

Numerical modeling of a novel TDM digital optical fiber communication link

Kevin J. Malloy, Stephen W. Farrer, Julian Cheng, 1993, Optics & Photonics.

Multiparameter CD measurements using scatterometry

John R. McNeil, Christopher J. Raymond, S. Sohail H. Naqvi, 1996, Advanced Lithography.

Metrology of etched quartz and chrome embedded phase shift gratings using scatterometry

Roger H. French, Susan M. Wilson, John R. McNeil, 1995, Advanced Lithography.

Scatterometric sensor for PEB process control

John R. McNeil, S. Sohail H. Naqvi, Steven L. Prins, 1996, Advanced Lithography.

Submicrometer lithographic alignment and overlay strategies

Saleem H. Zaidi, Steven R. J. Brueck, S. Sohail H. Naqvi, 1991, Optics & Photonics.

16 MB DRAM trench depth characterization using dome scatterometry

John R. McNeil, Ziad R. Hatab, S. Sohail H. Naqvi, 1994 .

Using scattered-light modeling for semiconductor critical dimension metrology and calibration

Donald R. Hush, Gary A. Peterson, John R. McNeil, 1993, Advanced Lithography.