M. Rothschild

Excimer Laser Projection Patterning With And Without Resists: Submicrometer Etching Of Diamond And Diamond-Like Carbon Resist

M. Rothschild, C. Arnonet, D. J. Ehrlich, 1986, Advanced Lithography.

Excimer Projection Lithography At 193-nm Wavelength

M. Rothschild, D. J. Ehrlich, 1988, Advanced Lithography.

A Nanoparticle Convective Directed Assembly Process for the Fabrication of Periodic Surface Enhanced Raman Spectroscopy Substrates

V. Liberman, M. Rothschild, T. Bloomstein, 2010, Advanced materials.

OPTICAL MATERIALS FOR EXCIMER LASER APPLICATIONS

M. Rothschild, 1993 .

Immersion lithography at 157 nm

M. Switkes, M. Rothschild, M. Rothschild, 2001 .

A review of excimer laser projection lithography

M. Rothschild, D. J. Ehrlich, D. Ehrlich, 1988 .