D. Vasilache

Compact membrane-supported bandpass filter for millimetre-wave applications

Patrick Pons, Robert Plana, L. Bary, 2004 .

V-shape through wafer via manufactured by drie variable isotropy process

F. Giacomozzi, B. Margesin, S. Ronchin, 2010, CAS 2010 Proceedings (International Semiconductor Conference).

Fabrication of through-wafer interconnections by gold electroplating

F. Giacomozzi, B. Margesin, S. Colpo, 2011, CAS 2011 Proceedings (2011 International Semiconductor Conference).

Wafer resistivity influence over DRIE processes for TSVs manufacturing

F. Giacomozzi, B. Margesin, S. Colpo, 2012, CAS 2012 (International Semiconductor Conference).

Micromachined hybrid integrated receiver modules for 38 GHz and 77 GHz, on silicon substrate, technology and manufacturing

I. Petrini, Alexandru Muller, Dan Neculoiu, 2002, Proceedings. International Semiconductor Conference.

Tunable bandstop MEMS filter for millimetre-wave applications

Herve Aubert, Patrick Pons, Robert Plana, 2007 .