Jerome B. Sohn

Micromachining inertial instruments

Jonathan J. Bernstein, Jeffrey T. Borenstein, Marc S. Weinberg, 1996, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

Characterization of membrane curvature in micromachined silicon accelerometers and gyroscopes using optical interferometry

Jeffrey T. Borenstein, Marc S. Weinberg, Paul Greiff, 1996, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

Photoassisted electrochemical micromachining of silicon in HF electrolytes

Jerome B. Sohn, P. Greiff, L. Niles, 1994 .