Ted Taylor

Investigation of optimized wafer sampling with multiple integrated metrology modules within photolithography equipment

Ted Taylor, Eri Makimura, 2007, SPIE Advanced Lithography.

The Ursinus Weekly, May 1, 1969

Jonathan Weaver, Alan Gold, Judith Earle, 1969 .

Product and tool control using integrated auto macro defect inspection in the photolithography cluster

David A. Dixon, Ted Taylor, Eri Makimura, 2010, Advanced Lithography.

Keynote talk: EUV Source: Technology and Performance

Ted Taylor, 2017, WMED 2017.

Advancements in predictive plasma formation modeling

Alice Koniges, Slava Rokitski, Aaron Fisher, 2016, SPIE Advanced Lithography.