Paul A. Spence

Optimal heat transfer design of chemical vapor deposition reactors

Christopher D. Moen, Paul A. Spence, Juan Meza, 1995 .

Film-stress-induced deformation of EUV reflective optics

Paul A. Spence, Avijit K. Ray-Chaudhuri, Michael P. Kanouff, 1999, Advanced Lithography.

Parallel optimization methods for agile manufacturing

Christopher D. Moen, Paul A. Spence, Juan Meza, 1997 .

Automatic differentiation for gradient-based optimization of radiatively heated microelectronics manufacturing equipment

Todd Plantenga, Paul A. Spence, Juan Meza, 1996 .

Thermal effects in diode-laser-pumped monolithic Nd:glass lasers

Paul A. Spence, Randal L. Schmitt, David G. Scerbak, 1991, Photonics West - Lasers and Applications in Science and Engineering.

Impact of thermal and structural effects on EUV lithographic performance

Christopher D. Moen, Paul A. Spence, Avijit K. Ray-Chaudhuri, 1998, Advanced Lithography.

The application of computational simulation to design optimization of an axisymmetric rapid thermal processing system

Paul A. Spence, W. S. Winters, Ahmad Kermani, 1994 .

Concurrent design of an RTP chamber and advanced control system

Charles D. Schaper, Paul A. Spence, Ahmad Kermani, 1995 .