Stan Drazkiewicz

Progression of overlay performance on a 0.5-NA broadband DUV wafer exposure system

David J. Cronin, Timothy J. Wiltshire, Joseph C. Vigil, 1994, Advanced Lithography.

Micrascan adaptive x-cross correlative independent off-axis modular (AXIOM) alignment system

Joe Lyons, Stan Drazkiewicz, Gregg Gallatin, 1996, Advanced Lithography.