Martin Dauelsberg

CVD reactor with retractable process chamber ceiling

Bernd Schulte, Johannes Käppeler, Martin Dauelsberg, 2006 .

Mass production of GaAs based optoelectronic devices in an AIX 2600G3 reactor in the 49x2 inch configuration

Michael Heuken, T. Schmitt, Bernd Schineller, 2004 .

Modelling of group-III nitride MOVPE in the closed coupled showerhead reactor and Planetary Reactor®

Michael Heuken, Adam Boyd, H. Protzmann, 2007 .

Modeling and process design of III-nitride MOVPE at near-atmospheric pressure in close coupled showerhead and planetary reactors

Michael Heuken, Adam Boyd, H. Protzmann, 2007 .

On mechanisms governing AlN and AlGaN growth rate and composition in large substrate size planetary MOVPE reactors

Johannes Baumgartl, Oliver Häberlen, Martin Dauelsberg, 2014 .

MOCVD Equipment for Recent Developments towards the Blue and Green Solid State Laser

Martin Dauelsberg, E. Woelk, Yu.N. Makarov, 1996 .

Modeling and experimental verification of transport and deposition behavior during MOVPE of Ga1-xInxP in the Planetary Reactor

M. Weyers, T. Bergunde, Martin Dauelsberg, 2000 .

InP based material for long wavelength optoelectronics grown in a 24/spl times/2" (8/spl times/4") multiwafer Planetary Reactor/spl reg/ for mass production

Michael Heuken, Martin Dauelsberg, Holger Juergensen, 2002, Conference Proceedings. 14th Indium Phosphide and Related Materials Conference (Cat. No.02CH37307).

Modelling and simulation of MOVPE of GaAs-based compound semiconductors in production scale Planetary Reactors

Michael Heuken, Martin Dauelsberg, Daniel Brien, 2007 .

Investigation of nitride MOVPE at high pressure and high growth rates in large production reactors by a combined modelling and experimental approach

Martin Dauelsberg, E. V. Yakovlev, A. S. Segal, 2011 .

Modeling and experimental verification of deposition behavior during AlGaAs growth: a comparison for the carrier gases N2 and H2

Hilde Hardtdegen, Martin Dauelsberg, L. Kadinski, 2001 .

Heat transfer and mass transport in a multiwafer MOVPE reactor: modelling and experimental studies

M. Weyers, T. Bergunde, Martin Dauelsberg, 1997 .