Erwin Peiner

发表

Neue taktile Sensoren für die Mikro- und NanotechnikNew Tactile Sensors for Micro- and Nanotechnology

Uwe Brand, Stephanus Büttgenbach, Vladimir Nesterov, 2008 .

Gravimetric humidity sensor based on ZnO nanorods covered piezoresistive Si microcantilever

Hutomo Suryo Wasisto, Hao Zhou, Erwin Peiner, 2017, Microtechnologies.

Fabrication of vertical nanowire resonators for aerosol exposure assessment

Hutomo Suryo Wasisto, Erwin Peiner, Andreas Waag, 2013, Microtechnologies for the New Millennium.

Strategy toward Miniaturized, Self-out-Readable Resonant Cantilever and Integrated Electrostatic Microchannel Separator for Highly Sensitive Airborne Nanoparticle Detection

Hutomo Suryo Wasisto, Erwin Peiner, Jiushuai Xu, 2019, Sensors.

Silicon cantilever sensor for micro-/nanoscale dimension and force metrology

Lutz Doering, Erwin Peiner, Andreas Christ, 2008, SPIE Microtechnologies.

Asymmetric resonance response analysis of a thermally excited silicon microcantilever for mass-sensitive nanoparticle detection

Hutomo Suryo Wasisto, Erwin Peiner, Maik Bertke, 2017, Microtechnologies.

Cleaning of nanopillar templates for nanoparticle collection using PDMS

Hutomo Suryo Wasisto, Erwin Peiner, Andreas Waag, 2011, Microtechnologies.

Fractures properties of InP microcantilevers by hetero-micromachining

Klaus Fricke, Erwin Peiner, Andreas Schlachetzki, 1999 .

Kontur-, Rauheits- und Kraftmesstechnik mit Silizium-Cantileversonden (Shape, Roughness and Force Metrology using Silicon Cantilever Sensors)

Lutz Doering, Erwin Peiner, Andreas Christ, 2008 .

ICP cryogenic dry etching for shallow and deep etching in silicon

Erwin Peiner, Andreas Waag, A. Stranz, 2009, Microtechnologies.

Large-area fabrication of silicon nanostructures by templated nanoparticle arrays

Hutomo Suryo Wasisto, Erwin Peiner, Maik Bertke, 2017, Microtechnologies.

Cantilever Sensors

Hutomo Suryo Wasisto, Erwin Peiner, E. Peiner, 2019, Sensors.

Sampling and Mass Detection of a Countable Number of Microparticles Using on-Cantilever Imprinting

Erwin Peiner, Harald Bosse, Wilson Ombati Nyang'au, 2020, Sensors.

Simulation and characterization of silicon nanopillar-based nanoparticle sensors

Hutomo Suryo Wasisto, Erwin Peiner, Kai Huang, 2013, Microtechnologies for the New Millennium.

Silicon nanowire resonators for aerosol nanoparticle mass sensing

A. Waag, Hutomo Suryo Wasisto, Erwin Peiner, 2013, The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems.

Design and fabrication of piezoresistive p-SOI Wheatstone bridges for high-temperature applications

Erwin Peiner, Andreas Waag, Stephan Merzsch, 2011, Microtechnologies.

Cantilever-Droplet-Based Sensing of Magnetic Particle Concentrations in Liquids

Harald Bosse, Erwin Peiner, Maik Bertke, 2019, Sensors.

Piezoresistive cantilever as portable micro force calibration standard

Lutz Doering, Erwin Peiner, Ingo Behrens, 2003 .

Development of silicon microforce sensors integrated with double meander springs for standard hardness test instruments

Hutomo Suryo Wasisto, Uwe Brand, Lutz Doering, 2015, Microtechnologies for the New Millennium.

Use of self-sensing piezoresistive Si cantilever sensor for determining carbon nanoparticle mass

Hutomo Suryo Wasisto, Erwin Peiner, Andreas Waag, 2011, Microtechnologies.

MEMS-based silicon cantilevers with integrated electrothermal heaters for airborne ultrafine particle sensing

Hutomo Suryo Wasisto, Erwin Peiner, Andreas Waag, 2013, Microtechnologies for the New Millennium.

Quality factor enhancement in AlN-actuated MEMS by velocity feedback loop

Ulrich Schmid, Tomas Manzaneque, José Luis Sánchez-Rojas, 2010 .

Smart sensors and calibration standards for high precision metrology

Sai Gao, Uwe Brand, Joachim Fruehauf, 2015, Microtechnologies for the New Millennium.

Condition monitoring with axle box bearings using resonant microelectromechanical sensors

Erwin Peiner, 2002 .

Nanostructured silicon for thermoelectric

Erwin Peiner, Andreas Waag, A. Stranz, 2011, Microtechnologies.

Electrothermal piezoresistive cantilever resonators for personal measurements of nanoparticles in workplace exposure

Hutomo Suryo Wasisto, Erwin Peiner, Andreas Waag, 2015, Microtechnologies for the New Millennium.

Fabrication of wear-resistant silicon microprobe tips for high-speed surface roughness scanning devices

Hutomo Suryo Wasisto, Uwe Brand, Lutz Doering, 2015, Microtechnologies for the New Millennium.

Double-meander spring silicon piezoresistive sensors as microforce calibration standards

Hutomo Suryo Wasisto, Uwe Brand, Lutz Doering, 2016 .

Transferable micromachined piezoresistive force sensor with integrated double-meander-spring system

Hutomo Suryo Wasisto, Uwe Brand, Lutz Doering, 2017 .

In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass Detection

Hutomo Suryo Wasisto, Erwin Peiner, Christian H Schwalb, 2020, Sensors.

Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm

Min Xu, Uwe Brand, Lutz Doering, 2019, Sensors.

Nanomechanical Characterization of Vertical Nanopillars Using an MEMS-SPM Nano-Bending Testing Platform

Karla Hiller, Erwin Peiner, Zhi Li, 2019, Sensors.

A closed-loop system for frequency tracking of piezoresistive cantilever sensors

Hutomo Suryo Wasisto, Qing Zhang, Erwin Peiner, 2013, Microtechnologies for the New Millennium.

Radar sensor and radar antenna for monitoring the surroundings of a motor vehicle

Arne F. Jacob, Erwin Peiner, Carsten Metz, 1999 .

Ultrafine Aerosol Particle Sizer Based on Piezoresistive Microcantilever Resonators with Integrated Air-Flow Channel

Erwin Peiner, Maik Bertke, Erik Uhde, 2021, Sensors.

Performance of an Electrothermal MEMS Cantilever Resonator with Fano-Resonance Annoyance under Cigarette Smoke Exposure

Hutomo Suryo Wasisto, Erwin Peiner, Alexander Deutschinger, 2021, Sensors.

Investigating the Trackability of Silicon Microprobes in High-Speed Surface Measurements

Uwe Brand, Erwin Peiner, Michael Fahrbach, 2021, Sensors.

In-Line Measurement of the Surface Texture of Rolls Using Long Slender Piezoresistive Microprobes

Uwe Brand, Erwin Peiner, Thomas Widmaier, 2021, Sensors.

Die-attach for high-temperature applications using fineplacer-pressure-sintering (FPS)

Erwin Peiner, Andreas Waag, Nicolas Heuck, 2010, 3rd Electronics System Integration Technology Conference ESTC.

Real-Time Frequency Tracking of an Electro-Thermal Piezoresistive Cantilever Resonator with ZnO Nanorods for Chemical Sensing

Hutomo Suryo Wasisto, Erwin Peiner, Jiushuai Xu, 2019, Chemosensors.

Evaluation of resonating Si cantilevers sputter-deposited with AlN piezoelectric thin films for mass sensing applications

Ulrich Schmid, Erwin Peiner, Andreas Waag, 2010 .

Piezoresistive Silicon Cantilever Covered by ZnO Nanorods for Humidity Sensing

Hutomo Suryo Wasisto, Erwin Peiner, Jiushuai Xu, 2016 .

Portable cantilever-based airborne nanoparticle detector

Hutomo Suryo Wasisto, Erwin Peiner, Andreas Waag, 2013 .

A phase-locked loop frequency tracking system for portable microelectromechanical piezoresistive cantilever mass sensors

Hutomo Suryo Wasisto, Erwin Peiner, Andreas Waag, 2014 .

3.2.1 Droplet-on-cantilever approach for determining the mass of magnetic particles

H. Bosse, Erwin Peiner, Maik Bertke, 2019, Tagungsband.

Low Noise Piezoresistive Micro Force Sensor

Uwe Brand, Lutz Doering, Erwin Peiner, 2006 .

Shallow and deep dry etching of silicon using ICP cryogenic reactive ion etching process

Erwin Peiner, Andreas Waag, Stephan Merzsch, 2010 .

Packaging of MEMS and MOEMS for harsh environments

Erwin Peiner, Andreas Waag, A. Stranz, 2012 .

Partially integrated cantilever-based airborne nanoparticle detector for continuous carbon aerosol mass concentration monitoring

Hutomo Suryo Wasisto, Erwin Peiner, Andreas Waag, 2015 .

Capabilities of ICP-RIE cryogenic dry etching of silicon: review of exemplary microstructures

Erwin Peiner, Marc Tornow, Andreas Waag, 2009 .

A micromachined vibration sensor based on the control of power transmitted between optical fibres

Peter Hauptmann, Erwin Peiner, Andreas Schlachetzki, 1998 .

Silicon cantilever sensor for micro-/nanoscale dimension and force metrology

Lutz Doering, Erwin Peiner, M. Balke, 2008 .

Force calibration of stylus instruments using silicon microcantilevers

Lutz Doering, Erwin Peiner, 2005 .

Contact resonance spectroscopy for on-the-machine manufactory monitoring

Hutomo Suryo Wasisto, Erwin Peiner, Jiushuai Xu, 2018, Sensors and Actuators A: Physical.

Fabrication of ZnO Nanorods on MEMS Piezoresistive Silicon Microcantilevers for Environmental Monitoring

Feng Yu, Erwin Peiner, Andrey Bakin, 2017 .

Electrical performance analysis and characterization of two port piezoelectric resonators

Erwin Peiner, Dara Feili, Helmut Seidel, 2013 .

Towards fabrication of 3D isotopically modulated vertical silicon nanowires in selective areas by nanosphere lithography

Hutomo Suryo Wasisto, Erwin Peiner, Maik Bertke, 2017 .

Fabrication and Characterization of Nanopillars for Silicon-Based Thermoelectrics

Erwin Peiner, Andreas Waag, A. Stranz, 2010 .

Nanoindentation of crystalline silicon pillars fabricated by soft UV nanoimprint lithography and cryogenic deep reactive ion etching

Hutomo Suryo Wasisto, Uwe Brand, Frank Pohlenz, 2018, Sensors and Actuators A: Physical.

Fabrication of ZnO nanorods and Chitosan@ZnO nanorods on MEMS piezoresistive self-actuating silicon microcantilever for humidity sensing

Feng Yu, Heiko Bremers, Erwin Peiner, 2018, Sensors and Actuators B: Chemical.

A procedure for temperature‐dependent, differential van der Pauw measurements

Erwin Peiner, Andreas Schlachetzki, A. Bartels, 1995 .

Thermoelectric Coolers with Sintered Silver Interconnects

Erwin Peiner, Andreas Waag, A. Stranz, 2014, Journal of Electronic Materials.

High-speed microprobe for roughness measurements in high-aspect-ratio microstructures

Uwe Brand, Lutz Doering, Sebastian Bütefisch, 2017 .

Microelectromechanical vibration sensor with optical interconnects

Erwin Peiner, Andreas Schlachetzki, Klaus Fricke, 1998 .

Evaluation of photoresist-based nanoparticle removal method for recycling silicon cantilever mass sensors

Hutomo Suryo Wasisto, Erwin Peiner, Andreas Waag, 2013 .

Measurements of thermoelectric properties of silicon pillars

Erwin Peiner, Andreas Waag, Ü. Sökmen, 2011 .

Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors

Hutomo Suryo Wasisto, Erwin Peiner, Jiushuai Xu, 2019, Journal of Sensors and Sensor Systems.

Piezoresistive microcantilevers for humidity sensing

Hutomo Suryo Wasisto, Erwin Peiner, Jiushuai Xu, 2019, Journal of Micromechanics and Microengineering.

Silicon resonant nanopillar sensors for airborne titanium dioxide engineered nanoparticle mass detection

Hutomo Suryo Wasisto, Erwin Peiner, Andreas Waag, 2013 .

Micromachined vibration sensor with on-chip circuitry and optical interconnects

Peter Hauptmann, Erwin Peiner, Andreas Schlachetzki, 1998 .

Fabrication, packaging, and characterization of p-SOI Wheatstone bridges for harsh environments

Lutz Doering, Erwin Peiner, Andreas Waag, 2012 .

Characterization of diesel injectors using piezoresistive sensors

Lutz Doering, Erwin Peiner, 2010, 2010 IEEE Sensors.

Enhanced performance of pocket-sized nanoparticle exposure monitor for healthy indoor environment

Hutomo Suryo Wasisto, Erwin Peiner, Erik Uhde, 2016 .

Determination of exposure to engineered carbon nanoparticles using a self-sensing piezoresistive silicon cantilever sensor

Hutomo Suryo Wasisto, Erwin Peiner, Andreas Waag, 2012 .

Piezoresistive Microcantilevers 3D-Patterned Using Zno-Nanorods@Silicon-Nanopillars for Room-Temperature Ethanol Detection

Erwin Peiner, Joan Daniel Prades, Jiushuai Xu, 2019, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII).

MEMS cantilever sensor for non-destructive metrology within high-aspect-ratio micro holes

Lutz Doering, Erwin Peiner, E. Peiner, 2009, 2009 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS.

A low-frequency micromechanical resonant vibration sensor for wear monitoring

Peter Hauptmann, Erwin Peiner, Andreas Schlachetzki, 1997 .

Surface finish improvement of deep micro bores monitored using an active MEMS cantilever probe

Lutz Doering, Erwin Peiner, Andrej Stranz, 2010, 2010 IEEE International Conference on Industrial Technology.

Finite element modeling and experimental proof of NEMS-based silicon pillar resonators for nanoparticle mass sensing applications

Hutomo Suryo Wasisto, Erwin Peiner, Andreas Waag, 2013, Microsystem Technologies.

Femtogram aerosol nanoparticle mass sensing utilising vertical silicon nanowire resonators

Hutomo Suryo Wasisto, Erwin Peiner, Andreas Waag, 2013 .

Three-dimensionally structured silicon as a substrate for the MOVPE growth of GaN nanoLEDs

Achim Trampert, Erwin Peiner, Peter Hinze, 2009 .

Vertical GaN Nanowires and Nanoscale Light-Emitting-Diode Arrays for Lighting and Sensing Applications

Hutomo Suryo Wasisto, Erwin Peiner, Tony Granz, 2019, ACS Applied Nano Materials.

Tactile probes for dimensional metrology with microcomponents at nanometre resolution

Uwe Brand, Lutz Doering, Erwin Peiner, 2008 .

Ultra Low Power Mass-Producible Gas Sensor Based on Efficient Self-Heated GaN Nanorods

Muhammad Fahlesa Fatahilah, Hutomo Suryo Wasisto, Erwin Peiner, 2019, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII).

Form measurement inside fuel injector nozzle spray holes

Lutz Doering, Erwin Peiner, M. Balke, 2009 .

Micro force sensor with piezoresistive amorphous carbon strain gauge

Saskia Biehl, Lutz Doering, Erwin Peiner, 2005 .

Fabrication of a microcantilever-based aerosol detector with integrated electrostatic on-chip ultrafine particle separation and collection

Erwin Peiner, Jiushuai Xu, Maik Bertke, 2019, Journal of Micromechanics and Microengineering.

A new micromachined sensor system for tactile measurements of high aspect ratio microstructures

Lutz Doering, Erwin Peiner, M. Balke, 2008 .

Improvement of frequency responses of an in-plane electro-thermal cantilever sensor for real-time measurement

Hutomo Suryo Wasisto, Erwin Peiner, Jiushuai Xu, 2019, Journal of Micromechanics and Microengineering.

Micromachined resonator for cavitation sensing

Peter Hauptmann, Erwin Peiner, Andreas Schlachetzki, 1999 .