P. Legallo

FEM-based method to determine mechanical stress evolution during process flow in microelectronics. Application to stress-voiding

S. Orain, X. Federspiel, J.-C. Barbé, 2004, 5th International Conference on Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, 2004. EuroSimE 2004. Proceedings of the.