Martina Rothe

Influence of resist-baking on the pattern quality of thick photoresists

Gabi Gruetzner, Bernd Loechel, S. Fehlberg, 1996, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

Application of ultraviolet depth lithography for surface micromachining

Martina Rothe, Andreas Maciossek, A. Maciossek, 1995 .

New negative-tone photoresists avoid swelling and distortion

Gabi Gruetzner, S. Fehlberg, Martina Rothe, 1997 .