Yoshiro Goto

CMOS device optimization for system-on-a-chip applications

Kiyotaka Imai, K. Yamaguchi, K. Matsui, 2000, International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138).

EB pulse O

K. Ookubo, Yoshiro Goto, Akio Ito, 2017 .

Improvement of voltage contrast in the scanning electron probe by floating the ground level of a device

Y. Furukawa, T. Inagaki, Yoshiro Goto, 1979 .

Hemispherical retarding type energy analyzer for IC testing by electron beam

Y. Furukawa, T. Inagaki, Yoshiro Goto, 1981 .

Improved energy analyzer for voltage measurement in electron beam probing for LSI diagnosis

Takefumi Inagaki, Yoshiro Goto, Kazuo Ookubo, 1985 .

Electron beam prober for VLSI diagnosis

Takefumi Inagaki, Yoshiro Goto, Toshihiro Ishizuka, 1985 .

Inspection for defects of a mask containing one‐ to submicrometer patterns using a scanning electron microscope and feature extraction method

Y. Furukawa, T. Inagaki, Yoshiro Goto, 1978 .