Masaki Kuki

Development of a reflectometer for a large EUV mirror in NewSUBARU

Takeo Watanabe, Hiroo Kinoshita, Tetsuo Harada, 2015, Other Conferences.

Extreme-ultraviolet collector mirror measurement using large reflectometer at NewSUBARU synchrotron facility

Hiroo Kinoshita, Tetsuo Harada, Michael D. Kriese, 2016 .

Development of Transmission Grating for EUV Interference Lithography of 1X nm HP

Hiroo Kinoshita, Tetsuo Harada, Masaki Kuki, 2015 .

Development of High-Reflective W/Si-multilayer Diffraction Grating for the Analysis of Fluorine Materials

Hiroo Kinoshita, Tetsuo Harada, Masaki Kuki, 2015 .