Mark van de Kerkhof
发表
Klaus Simon,
Mark van de Kerkhof,
Eelco van Setten,
2008,
SPIE Advanced Lithography.
Hans Meiling,
Mark van de Kerkhof,
Leon Levasier,
2018,
Advanced Lithography.
Steve Hansen,
Mark van de Kerkhof,
Wim de Boeij,
2006,
SPIE Advanced Lithography.
Kafai Lai,
Bernhard Kneer,
Michael Totzeck,
2007,
SPIE Advanced Lithography.
Mark van de Kerkhof,
Andrei Yakunin,
Vladimir Kvon,
2020,
Advanced Lithography.
Mark van de Kerkhof,
Eelco van Setten,
Wim de Boeij,
2007,
SPIE Advanced Lithography.
Mark van de Kerkhof,
Leon Levasier,
Roderik van Es,
2017,
Photomask Technology.
Bernhard Kneer,
Jan Mulkens,
Mark van de Kerkhof,
2006,
SPIE Advanced Lithography.
Guido Schiffelers,
Marieke Meeuwissen,
Natalia Davydova,
2020,
Advanced Lithography.
Judon Stoeldraijer,
Hans Meiling,
Peter Kuerz,
2011,
Proceedings of 2011 International Symposium on VLSI Technology, Systems and Applications.
Mark van de Kerkhof,
Daniel Smith,
Par Broman,
2016,
SPIE Advanced Lithography.
Marieke Meeuwissen,
Natalia Davydova,
Robert de Kruif,
2020,
Journal of Micro/Nanolithography, MEMS, and MOEMS.
Mark van de Kerkhof,
Haico Kok,
Barry Moest,
2010,
Photomask Technology.
Particulate and molecular contamination control in EUV-induced H2-plasma in EUV lithographic scanner
Mark van de Kerkhof,
Andrei Yakunin,
Selwyn Cats,
2020,
Optical Engineering + Applications.
Judon Stoeldraijer,
Hans Meiling,
Peter Kuerz,
2011,
Advanced Lithography.
Torsten Feigl,
Mark van de Kerkhof,
Uwe Zeitner,
2018,
Advanced Lithography.
John Zimmerman,
Brid Connolly,
Natalia Davydova,
2011,
Photomask Technology.
Mark van de Kerkhof,
Christophe Smeets,
Andrei Yakunin,
2019,
Advanced Lithography.
Mark van de Kerkhof,
Bernd Geh,
Marcel Demarteau,
2006,
SPIE Advanced Lithography.
Friso Wittebrood,
Timon Fliervoet,
Mark van de Kerkhof,
2017,
European Mask and Lithography Conference.
Mark van de Kerkhof,
Leon Levasier,
Roderik van Es,
2017,
Advanced Lithography.
Mark van de Kerkhof,
Arjen de Jong,
René T. M. Jilisen,
2015,
Advanced Lithography.
Jo Finders,
Tilmann Heil,
Jan Mulkens,
2004,
SPIE Advanced Lithography.
Markus Waiblinger,
Mark van de Kerkhof,
Christian Cloin,
2021,
Advanced Lithography.
Mark van de Kerkhof,
Vadim Banine,
Andrei M. Yakunin,
2021,
Journal of Micro/Nanopatterning, Materials, and Metrology.
Mark van de Kerkhof,
Vadim Banine,
Andrey Nikipelov,
2021,
Advanced Lithography.