Howard Scott

EUV generation from lithium laser plasma for lithography

Martin Richardson, Chiew-Seng Koay, Simi A. George, 2006, SPIE Advanced Lithography.

Radiation transport modeling for Xe and Sn-doped droplet laser-plasma sources

Martin Richardson, Vivek Bakshi, Christian Keyser, 2005, SPIE Advanced Lithography.

EUV spectroscopy of mass-limited Sn-doped laser micro-plasmas

Vivek Bakshi, Simi George, Chiew-Seng Koay, 2005, SPIE Advanced Lithography.