Takayuki Iseki

Shrinking design of a MEMS optical scanner having four torsion beams and arms

Takashi Sugawara, Mikio Okumura, Takayuki Iseki, 2010 .

High‐Speed and Wide‐Angle Deflection Optical MEMS Scanner Using Piezoelectric Actuation

Takashi Sugawara, Mikio Okumura, Takayuki Iseki, 2010 .

Chemical composition distribution analysis of photoresist copolymers and influence on ArF lithographic performance

Takashi Nishimura, Tatsuki Kitayama, Atsushi Yasuda, 2007, SPIE Advanced Lithography.

Two-Dimensionally Deflecting Mirror Using Electromagnetic Actuation

Takashi Sugawara, Mikio Okumura, Takayuki Iseki, 2006 .