K. A. Goldberg

Multilayer defects nucleated by substrate pits: a comparison of actinic inspection and non-actinic inspection techniques

P. Kearney, A. Barty, K. A. Goldberg, 2006, SPIE Photomask Technology.

Actinic EUV Mask Inspection Beyond 0 . 25

E. H. Anderson, P. Naulleau, I. Mochi, 2008 .

Recent developments in X-UV optics and X-UV diagnostics

J. J. Rocca, J. Dunn, S. Hubert, 2004 .

Benchmarking EUV Mask Inspection Beyond 0 . 25

E. H. Anderson, P. Naulleau, I. Mochi, 2008 .