Keisuke Shinagawa

A method of manufacturing an integrated semiconductor circuit

Shuzo Fujimura, Takahiro Ito, Jun-Ichi Konno, 1991 .

Protection of aluminum alloy films from after corrosion using H2O down stream ashing

T. Takada, Shuzo Fujimura, Jun-Ichi Konno, 1992, Other Conferences.

Surface Wave Plasma Production Employing High-Permittivity Material for Microwave Window

Haruo Shindo, Keisuke Shinagawa, Kouta Kusaba, 2001 .

Oxygen Microwave Plasma Density Enhancement by Surface Waves with a High-Permittivity Material Window

Haruo Shindo, Keisuke Shinagawa, Masakazu Furukawa, 1999 .

Ashing Properties in a Surface-Wave Mode Plasma with a High-Permittivity Alumina Window.

Haruo Shindo, Keisuke Shinagawa, Kouta Kusaba, 2001 .