B. E. Goodlin

Simultaneous Fault Detection and Classification for Semiconductor Manufacturing Tools

Duane S. Boning, Barry M. Wise, B. E. Goodlin, 2003 .

A statistical analysis of single and multiple response surface modeling

Duane S. Boning, Taber H. Smith, B. E. Goodlin, 1999 .

Bias and variance in single and multiple response surface modeling

Duane S. Boning, J. E. Chung, Taber H. Smith, 1998, IWSM. 1998 3rd International Workshop on Statistical Metrology (Cat. No.98EX113).

Simultaneous Fault Detection and Identification for Plasma Etching Processes

Duane S. Boning, Barry M. Wise, B. E. Goodlin, 2002 .

Low open-area endpoint detection using a PCA-based T/sup 2/ statistic and Q statistic on optical emission spectroscopy measurements

Duane S. Boning, B. E. Goodlin, Herbert H. Sawin, 2000 .