F. Bigl

发表

Advanced technology for deep precision aspheres fabrication with high convergence-demonstration of the processing cycle

Axel Schindler, Martin Weiser, Thomas J. Haensel, 2000 .

Excimer laser machining for the fabrication of analogous microstructures

Dietmar Hirsch, F. Bigl, D. Hirsch, 1996 .

Replication of 3D-micro- and nanostructures using different UV-curable polymers

Klaus Zimmer, Dietmar Hirsch, F. Bigl, 2000 .

Combination of contour and half-tone masks used in laser ablation

F. Bigl, A. Braun, K. Zimmer, 2000 .

Excimer laser-induced etching of sub-micron surface relief gratings in fused silica using phase grating projection

Klaus Zimmer, Bernd Rauschenbach, Rico Böhme, 2002 .

Excimer laser micromachining and replication of 3D optical surfaces

F. Bigl, A. Braun, K Zimmer, 1998 .

Combination of different processing methods for the fabrication of 3D polymer structures by excimer laser machining

F. Bigl, A. Braun, K. Zimmer, 2000 .

Reactive ion beam etching of InSb and InAs with ultrasmooth surfaces

F. Bigl, F. Frost, A. Schindler, 1998 .