L. Sigal

发表

Lars W. Liebmann, Arnold Eugene Barish, Zachary Baum, 2004, SPIE Advanced Lithography.

L. Sigal, Howard H. Smith, Yiu-Hing Chan, 2001 .

L. Sigal, Matthew M. Ziegler, Jeffrey A. Zitz, 2015 .

Gregory A. Northrop, L. Sigal, Howard H. Smith, 1999 .

Lars W. Liebmann, Arnold Eugene Barish, Carlos Fonseca, 2003, SPIE Advanced Lithography.

L. Sigal, N. Zamdmer, E. Nowak, 2015, 2015 IEEE International Electron Devices Meeting (IEDM).