Etienne Quesnel

发表

EUV mask blank: defect detection at 100 nm

Catherine Pelle, Jean Hue, Etienne Quesnel, 2003, SPIE Advanced Lithography.

Phase-shift mask for EUV lithography

Etienne Quesnel, Viviane Muffato, Denis Joyeux, 2006, SPIE Advanced Lithography.

EUV mask blank activities at LETI: defect detection at 80 nm

Etienne Quesnel, Viviane Muffato, Jean Hue, 2005, SPIE Advanced Lithography.

Automated set-up for extreme-ultraviolet mask lithography: the first step to count and clean in one

Catherine Pelle, Pierre Garrec, Jean Hue, 2001, SPIE Advanced Lithography.

Study of ion-beam-sputtered Mo/Si mirrors for EUV lithography mask: influence of sputtering gas

Etienne Quesnel, Viviane Muffato, Caroline Teyssier, 2004, SPIE Optical Systems Design.

Growth and thermal stability of interfaces in ion beam sputtered Mo/Si mirrors

Etienne Quesnel, Viviane Muffato, C. Largeron, 2005, SPIE Optical Systems Design.

Integration aspects of a polymer based SPR biosensor with active micro optical and micro fluidic elements

Janko Auerswald, Helmut Knapp, Guy Voirin, 2007 .

Dimensioning a full color LED microdisplay for augmented reality headset in a very bright environment

Philippe Coni, Badhise Ben Bakir, Etienne Quesnel, 2020, Journal of the Society for Information Display.

Investigation of nodule growth in ion beam sputtered Mo/Si multilayers

Catherine Pelle, Etienne Quesnel, Viviane Muffato, 2004 .

Interface growth mechanism in ion beam sputtering-deposited Mo/Si multilayers

Etienne Quesnel, Jany Thibault, Christophe Largeron, 2006 .

Reduction of defect density on blanks: application to the extreme ultraviolet lithography

Etienne Quesnel, Pascal Besson, S. Favier, 2002 .

Effect of systematic errors in spectral photometric data on the accuracy of determination of optical parameters of dielectric thin films.

Angela Duparré, Detlev Ristau, Etienne Quesnel, 2002, Applied optics.

Investigation of the surface micro-roughness of fluoride films by spectroscopic ellipsometry

Alexander V. Tikhonravov, Michael K. Trubetskov, Angela Duparré, 2001 .

Laser damage studies on MgF2 thin films

Angela Piegari, Angela Duparré, Detlev Ristau, 2001 .

Optical and microstructural properties of MgF2 UV coatings grown by ion beam sputtering process

Etienne Quesnel, Francesca Peiró, E. Quesnel, 2000 .

Characterization of optics and masks for the EUV lithography

Pierre Boher, Roland Geyl, Etienne Quesnel, 2002 .

Ultraviolet optical and microstructural properties of MgF2 and LaF3 coatings deposited by ion-beam sputtering and boat and electron-beam evaporation.

Angela Duparré, Detlev Ristau, Etienne Quesnel, 2002, Applied optics.