Kiyoto Mashima

Fabrication of aspherical mirrors for HiNA (high numerical aperture EUV exposure tool) set-3 projection optics

Hiroaki Oizumi, Hiroyuki Kondo, Shinji Okazaki, 2004, SPIE Advanced Lithography.

Development of illumination optics and projection optics for high-NA EUV exposure tool (HiNA)

Kazuya Ota, Iwao Nishiyama, Hiroaki Oizumi, 2003, SPIE Advanced Lithography.

Fabrication of aspherical mirrors for EUV projection optics set-3 of HiNA

Iwao Nishiyama, Hiroaki Oizumi, Shinji Okazaki, 2004, SPIE Optics + Photonics.

A Novel Design of Three-Aspherical-Mirror Imaging Optics for Extreme Ultra-Violet Lithography

Masahito Niibe, Hiroo Kinoshita, Kiyoto Mashima, 1997 .

Development of projection optics set-3 for high-numerical-aperture extreme ultraviolet exposure tool (HiNA)

Iwao Nishiyama, Hiroaki Oizumi, Shinji Okazaki, 2004 .