The problem of sub-Rayleigh resolution in interference microscopy

The method allowing one to achieve sub-Rayleigh resolution in optical interferometric microscopy is offered. It is shown that for this purpose it is not necessary to overcome the diffraction limit. Generally speaking, “sub-Rayleigh resolution” and “overcoming of diffraction limit” are essentially different concepts. Our method uses the modulation of all parameters of a light source and the separation of the phase shifts of different origin. The method is worked out that makes it possible to measure the different phases separately and, therefore, to determine the related characteristics of an object. Our approach opens a way to a new type of optical devices. These devices can determine both geometrical and material parameters of the object in a unique measuring procedure.