论文信息 - A Neural Networks Approach to Conltrol the Tem on Rapid Thermal Processing

A Neural Networks Approach to Conltrol the Tem on Rapid Thermal Processing

In this paper an innovative strategy baaed on neural networks has been introduced for Rapid ')Thermal Processes (HTP) nmdeling. The non-linearity of the mentioned processes has bleen successfully dealt and a satisfactory model has been derived. Ntimerical simulations emphasize the suitability of the inifrodiiced approach.

G. Nunn | R. Papaleo | Vide A. Doria | Dipartimcnto Elcttrico

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