论文信息 - Low-threshold DFB-laser-integrated high-speed EA modulators based on ridge waveguide structure by ICP etching

Low-threshold DFB-laser-integrated high-speed EA modulators based on ridge waveguide structure by ICP etching

Inductively coupled plasma (ICP) dry etching technique has been adopted to form narrow high-mesa ridge waveguide structure in a high-speed integrated EA modulator. A 3dBe bandwidth of over 12 GHz has been achieved without the use of polyimide in the DFB laser integrated EA modulator. Meanwhile, integrated device with a threshold current as low as 12 mA has been demonstrated by optimization ofthe wavelength detuning.

Jian Wang | Bing Xiong | Changzheng Sun | Zhibiao Hao | Yi Luo

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