Watt-level tunable deep ultraviolet light source by a KBBF prism-coupled device.

We have obtained an average output power as much as 1.2 W at 200 nm by using a 2.71-mm thick KBe2BO3F2 crystal optically contacted by CaF2 and SiO2 prisms on the both sides. Watt-level average-power was generated tunably in the deep ultraviolet region from 185 nm to 200 nm. The average power is the highest, to our knowledge, ever obtained by nonlinear crystals in the wavelength region below 200 nm.

[1]  T. Togashi,et al.  Generation of milliwatt narrow-bandwidth vacuum ultraviolet radiation by an all-solid-state tunable high-average-power laser system. , 2001, Optics letters.

[2]  Chengqian Zhang,et al.  Generation of vacuum-ultraviolet light by an optically contacted, prism-coupled KBe2BO3F2 crystal. , 2003, Optics letters.

[3]  Tadashi Togashi,et al.  Generation of vacuum-ultraviolet light below 160 nm in a KBBF crystal by the fifth harmonic of a single-mode Ti:sapphire laser , 2004 .

[4]  Chuangtian Chen.  New borate crystals promise deep-UV harmonic generation , 2004 .

[5]  K. Kato,et al.  Phase-matched UV generation at 0.1774 μm in KB(5)O(8) ·4H(2)O. , 1996, Applied optics.

[6]  Hikaru Kouta,et al.  Attaining 186-nm light generation in cooled ?-BaB 2 O 4 crystal , 1999 .

[7]  Satoshi Tanaka,et al.  Reliable high-power injection locked 6kHz 60W laser for ArF immersion lithography , 2007, SPIE Advanced Lithography.

[8]  Guiling Wang,et al.  Improved Sellmeier Equations and Phase-Matching Characteristics in Deep-Ultraviolet Region of ${\hbox {KBe}}_{2}{\hbox {BO}}_{3}{\hbox {F}}_{2}$ Crystal , 2008, IEEE Journal of Quantum Electronics.

[9]  T. Togashi,et al.  Photoemission spectroscopic evidence of gap anisotropy in an f-electron superconductor. , 2005, Physical review letters.

[10]  T. Togashi,et al.  All-solid-state high-peak-power Ti:sapphire laser system above 5-kHz repetition rate , 2000 .

[11]  X Y Wang,et al.  High-average-power light source below 200 nm from a KBe(2)BO(3)F(2) prism-coupled device. , 2008, Optics letters.

[12]  Ning Ye,et al.  The vacuum ultraviolet phase‐matching characteristics of nonlinear optical KBe2BO3F2 crystal , 1996 .

[13]  F Noack,et al.  Generation of tunable femtosecond pulses to as low as 172.7 nm by sum-frequency mixing in lithium triborate. , 1994, Optics letters.

[14]  T. Togashi,et al.  Second-harmonic generation from a KBe(2) BO(3)F(2) crystal in the deep ultraviolet. , 2002, Optics letters.