A compact SPDT RF MEMS switch with high contact force

This paper presents the design, fabrication and measurements on a new metal-contact RF MEMS single-pole double-throw (SPDT) switch with low sensitivity to stress gradients. The switch is based on a circular geometry with arc type springs, and results in high contact force, fast switching time, and excellent microwave performance to ≫ 30 GHz. To our knowledge, this is the smallest high-performance SPDT switches to-date (0.04 mm2).

[1]  G.M. Rebeiz,et al.  Parallel-contact metal-contact RF-MEMS switches for high power applications , 2004, 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest.

[2]  Gabriel M. Rebeiz,et al.  A Novel Stress-Gradient-Robust Metal-Contact Switch , 2009, 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems.

[3]  Júlio Costa,et al.  INTEGRATED MEMS SWITCH TECHNOLOGY ON SOI-CMOS , 2008 .

[4]  J. Maciel,et al.  A packaged, high-lifetime ohmic MEMS RF switch , 2003, IEEE MTT-S International Microwave Symposium Digest, 2003.