Lattice-Matched GaN–InAlN Waveguides at = 1:55 m Grown by Metal–Organic Vapor Phase Epitaxy

We report on the demonstration of low-loss, single-mode GaN–InAlN ridge waveguides (WGs) at fiber-optics telecommunication wavelengths. The structure grown by metal–organic vapor phase epitaxy contains AlInN cladding layers lattice-matched to GaN. For slab-like WGs propagation losses are below 3 dB/mm and independent of light polarization. For 2.6m-wide WGs the propagation losses in the 1.5to 1.58m spectral region are as low as 1.8 and 4.9 dB/mm for transverse-electricand transverse-magnetic-polarization, respectively. The losses are attributed to the sidewall roughness and can be further reduced by the optimization of the etching process.

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