Extraction of roughness measurements from thin resists with low signal-to-noise-ratio (SNR) SEM images by applying deep learning denoiser
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D. de Simone | P. Leray | G. Lorusso | A. Charley | S. De Gendt | J. Severi | S. Halder | Bappaditya Dey | Mohamed Zidan | D. De Simone