论文信息 - CMOS Microsystem Front-End for MicroTesla Resolution Magnetic Field Measurement

CMOS Microsystem Front-End for MicroTesla Resolution Magnetic Field Measurement

In this paper we discuss the conception and performances of a monolithic microsystem for magnetic field measurement built in standard 0.6 μm CMOS technology. It is shown that 5.2 microTesla resolution over 1 kHz bandwidth (5 Hz to 1 kHz) can be achieved by combining a particular Hall effect based sensing device and appropriate analog conditioning electronics. The study focuses on the methods used to drive up the sensor's sensitivity and to drive down the system's noise level in order to achieve the above-mentioned resolution. A specific circuitry is proposed for biasing the sensor.

Philippe Poure | Vincent Frick | L. Hebrard | F. Braun

[1] H. Baltes,et al. Integrated semiconductor magnetic field sensors , 1986, Proceedings of the IEEE.

[2] Radivoje Popovic,et al. Integrated Hall-effect magnetic sensors , 2001 .

[3] Kenneth R. Laker,et al. Design of analog integrated circuits and systems , 1994 .

[4] F. Hooge. 1/f noise sources , 1994 .

[5] Y. Tsividis. Operation and modeling of the MOS transistor , 1987 .

[6] G.A. Rincon-Mora,et al. Active capacitor multiplier in Miller-compensated circuits , 2000, IEEE Journal of Solid-State Circuits.

[7] L.K.J. Vandamme,et al. Bulk and surface 1/f noise , 1989 .

[8] K. Kano. Semiconductor Devices , 1997 .

[9] Gaetano Palumbo,et al. Design Procedure for Two-Stage CMOS Transconductance Operational Amplifiers: A Tutorial , 2001 .

[10] Philippe Poure,et al. Design and modelling of a voltage controlled N-well resistor using the MOS tunneling diode structure , 2002, 9th International Conference on Electronics, Circuits and Systems.

[11] Radivoje Popovic,et al. The future of magnetic sensors , 1996 .

[12] Philippe Poure,et al. CMOS microsystem for AC current measurement with galvanic isolation , 2002, Proceedings of IEEE Sensors.

[13] Maher Kayal,et al. Highly sensitive Hall magnetic sensor microsystem in CMOS technology , 2002, IEEE J. Solid State Circuits.

[14] P.J.A. Munter. A low-offset spinning-current hall plate , 1990 .