论文信息 - Near-field solid immersion lens (SIL) microscope with advanced compact mechanical design

Near-field solid immersion lens (SIL) microscope with advanced compact mechanical design

A compact mechanical package is developed for a standard microscope that implements a solid immersion lens (SIL) on a retractable bimorph swing arm. With the compact package mounted on an inverted microscope, far-field and near-field images are obtained at the same location by moving the SIL in place with the swing arm. With white-light incoherent illumination, the resolution of this system for observing digital versatile discs (DVDs) is around 200nm with an effective NA of 1.5. Imaging with the SIL is compared to an atomic force microscopy (AFM) scan.

[1] Thomas D Milster. Near-field optical data storage: avenues for improved performance , 2001 .

[2] T. Ishimoto,et al. Gap servo system for a biaxial device using an optical gap signal in a near field readout system , 2002, International Symposium on Optical Memory and Optical Data Storage Topical Meeting.

[3] J. Weaver,et al. Scanning near-field optical spectroscopy and imaging using nanofabricated probes , 1999 .

[4] G. Kino,et al. Solid immersion microscope , 1990 .

[5] Yuji Kuroda,et al. Near-field phase-change optical recording over 1.2 numerical aperture , 1999, Optical Data Storage.

[6] C. Poweleit,et al. Raman imaging of patterned silicon using a solid immersion lens , 1998 .

[7] V. Elings,et al. Imaging with solid immersion lenses, spatial resolution, and applications , 2000, Proceedings of the IEEE.