论文信息 - Advanced Barriers for Copper Interconnects - 字舞流文

Advanced Barriers for Copper Interconnects

H. Engelmann | M. Hecker | C. Wenzel | R. Hübner | S. Schulz | N. Mattern | H. Heuer | J. Acker | R. Ecke | V. Hoffmann | E. Zschechd | H. Engelmann