Design and simulation of 4-bit 10-14GHz RF MEMS tunable filter

This paper presents a 4-bit RF microelectromechanical system (MEMS) wide-band tunable filter at the 10–14GHz frequency range. Open-ended shunt stubs is utilized to load RF MEMS capacitive switches and MAM capacitors acting as the tunable cells, and leads to lower loss and more flexibility of design. The simulation results obtained by 3D electromagnetic simulation tool show that the tuning range is about 30% (from 10.5GHz to 13.5GHz) and the insertion loss is from −4.8dB to −5.2dB.