Development of ion-implanted optical waveguides in optical materials: A review

As one of most efficient techniques for material-property modification, ion implantation has shown its unique ability for alteration of surface refractive index of a large number of optical materials, forming waveguide structures. The induced refractive index changes are materials related, and closely dependent on the species, energies and doses of the implanted ions. This paper reviews the results of recent research on the fabrication, investigation and applications of the ion-implanted optical waveguides in various optical materials, including crystals and non-crystalline glasses. As will be summarized, ion implantation offers a nearly universal solution for the waveguide fabrication in most existing optical materials to date, which opens up new possibilities of attractive optical applications.

[1]  P. Canarelli,et al.  Continuous-wave infrared laser spectrometer based on difference frequency generation in AgGaS 2 for high-resolution spectroscopy , 1992 .

[2]  H. Weber,et al.  Loss measurements in thin-film optical waveguides. , 1973, Applied optics.

[3]  A. Wieck,et al.  Fabrication of two-dimensional electron systems by focused ion beam doping of III/V semiconductor heterostructures , 2003 .

[4]  G. H. Chartier,et al.  Three‐prism loss measurements of optical waveguides , 1980 .

[5]  Mk Meint Smit,et al.  Net optical gain at 1.53 mu m in Er-doped Al2O3 waveguides on silicon , 1996 .

[6]  Feng Chen,et al.  Refractive index profiles in LiNbO3 waveguide formed by 3.2 MeV He ions , 2000 .

[7]  Ion implanted integrated optics (I3O) technology for planar lightwave circuits fabrication , 2004 .

[8]  P. Günter,et al.  Birefringence phase-matched blue light second-harmonic generation in a KNbO3 ridge waveguide , 1998 .

[9]  P. Hertel,et al.  Improved inverse WKB procedure to reconstruct refractive index profiles of dielectric planar waveguides , 1987 .

[10]  Lei Wang,et al.  Planar optical waveguide in potassium titanyl arsenate formed by oxygen ion implantation at low doses , 2006 .

[11]  G. K. Reeves,et al.  Refractive indices and thicknesses of optical waveguides fabricated by silicon ion implantation into silica glass , 1999 .

[12]  D. Sarid,et al.  Prism coupling into clad uniform optical waveguides , 1980 .

[13]  Nam Quoc Ngo,et al.  Novel fiber-to-waveguide coupling method using silicon-on-insulator micromachining techniques , 1999, Smart Materials, Nano-, and Micro- Smart Systems.

[14]  Y. Jiang,et al.  Construction of refractive‐index profiles of graded‐index planar waveguides from effective indexes measured with different mode types and external refractive indexes , 2005 .

[15]  P. Moretti,et al.  Refractive index and anisotropy measurements in He+ implanted KTiOPO4 (KTP) optical waveguides , 1996 .

[16]  C. Buchal.  Ion implantation for optical applications , 1995 .

[17]  A. Roberts,et al.  Ion beam energy attenuation for fabrication of buried, variable-depth, optical waveguides , 2000 .

[18]  Ke-ming Wang,et al.  Lithium niobate channel waveguide at optical communication wavelength formed by multienergy implantation. , 2005, Optics express.

[19]  Feng Chen,et al.  Optical planar waveguide fabricated in Nd:LuVO4 crystal by MeV oxygen implantation. , 2005, Optics express.

[20]  Edmond J. Murphy,et al.  Integrated Optical Circuits and Components: Design and Applications , 1999 .

[21]  A. Agranat,et al.  Thermal stability of a slab waveguide implemented by α particles implantation in potassium lithium tantalate niobate , 2005 .

[22]  A. Kaminskiĭ,et al.  Crystalline Lasers: Physical Processes and Operating Schemes , 1996 .

[23]  P. Moretti,et al.  RBS study of defect profiles in proton implanted LiNbo3 , 1995 .

[24]  P. Moretti,et al.  Optical Waveguides in Lead Germanate Formed by MeV Proton and Helium Ion Implantation , 1998 .

[25]  P. Moretti,et al.  Ion implantation effects in BaTiO3 single crystals , 1991 .

[26]  P. Moretti,et al.  Electro-optic coefficients in H+-ion implanted LiNbO3 planar waveguide , 1999 .

[27]  Ke Liu,et al.  Erbium-doped waveguide amplifiers fabricated using focused proton beam writing , 2004 .

[28]  Feng Chen,et al.  Double optical waveguide in Cu-doped KNSBN crystal formed by MeV boron ion implantation , 2003 .

[29]  Alan Arai,et al.  Waveguide writing in fused silica with a femtosecond fiber laser at 522 nm and 1 MHz repetition rate. , 2005, Optics express.

[30]  Feng Chen,et al.  Ion-implanted Nd:YVO(4) planar waveguide: refractive-index characterization and propagation mode reduction. , 2002, Optics letters.

[31]  Ivan P. Kaminow,et al.  Loss in cleaved Ti‐diffused LiNbO3 waveguides , 1978 .

[32]  Feng Chen,et al.  Optical waveguide formation by MeV H+ implanted into LiNbO3 crystal , 2000 .

[33]  Johann Peter Reithmaier,et al.  Focused ion beam implantation for opto- and microelectronic devices , 1998 .

[34]  John D. Bierlein,et al.  Electro-optic and dielectric properties of KTiOPO4 , 1986 .

[35]  P. Moretti,et al.  Luminescence of Nd3+ in proton or helium-implanted channel waveguides in Nd :YAG crystals , 2003 .

[36]  F. Laurell,et al.  Nonlinear optical properties of (H + ,He + )- implanted planar waveguides in z-cut lithium niobate: annealing effect , 2001 .

[37]  Mark C Ridgway,et al.  Thermal annealing of implantation‐induced compaction for improved silica waveguide performance , 1996 .

[38]  J. Rams,et al.  Mode gaps in the refractive index properties of low-dose ion-implanted LiNbO3 waveguides , 2000 .

[39]  D. Moutonnet,et al.  Buried optical waveguides in fused silica by high−energy oxygen ion implantation , 1975 .

[40]  P. J. Chandler,et al.  Extra ‘‘strange’’ modes in ion implanted lithium niobate waveguides , 1991 .

[41]  Vincent Aimez,et al.  Neutral ion-implantation-induced selective quantum-dot intermixing , 2005 .

[42]  E. Flores-Romero,et al.  Planar waveguide lasers by proton implantation in Nd:YAG crystals. , 2004, Optics express.

[43]  P. Günter,et al.  Photorefractive effect in proton-implanted Fe-doped KNbO 3 waveguides at telecommunication wavelengths , 1996 .

[44]  A. Dazzi,et al.  Guiding properties and nonlinear wave mixing at 854 nm in a rhodium-doped BaTiO 3 waveguide implanted with He + ions , 2001 .

[45]  C. Schmidt,et al.  Maskless patterning of KTiOPO4 crystals by focused ion beam , 1998 .

[46]  T. Sawada,et al.  Helium ion implantation-induced defects in silicon probed with variable-energy positrons , 2003 .

[47]  Chunchen Lin,et al.  Creation of second-order nonlinearity and quasi-phase-matched second-harmonic generation in Ge-implanted fused silica planar waveguide , 2005 .

[48]  Detlef Kip,et al.  Photorefractive steady state solitons up to telecommunication wavelengths in planar SBN waveguides , 2001 .

[49]  P. Townsend,et al.  Very low loss ion implanted planar waveguides in lead germanate glass , 1993 .

[50]  Eugenio Cantelar,et al.  Continuous-wave laser action at λ=1064.3 nm in proton- and carbon-implanted Nd:YAG waveguides , 2003 .

[51]  Sisa Pityana,et al.  Frequency doubling in ion-implanted KTiOPO4 planar waveguides with 25 % conversion efficiency , 1993 .

[52]  Detlef Kip,et al.  Photorefractive waveguides in oxide crystals: fabrication, properties, and applications , 1998 .

[53]  P. Günter,et al.  Depth profile of the nonlinear optical susceptibility of ion‐implanted KNbO3 waveguides , 1995 .

[54]  Peter Dannberg,et al.  Precise waveguide loss measurement by a modified two-prism method , 1994, Integrated Optoelectronics.

[55]  Y. Silberberg.  Collapse of optical pulses. , 1990, Optics letters.

[56]  Detlef Kip,et al.  All-optical signal routing using interaction of mutually incoherent spatial solitons , 2002 .

[57]  Anne C. Tropper,et al.  1.9-μm operation of a Tm:lead germanate glass waveguide laser , 1994 .

[58]  M. Levy,et al.  Optical waveguides in lead zinc niobate-lead titanate by He ion implantation , 2003 .

[59]  G. A. Zykov,et al.  Nonlinear optical waveguides produced by MeV ion implantation in LiNbO3 , 2000 .

[60]  P. Moretti,et al.  Observation of bright spatial photorefractive solitons in a planar strontium barium niobate waveguide. , 1998, Optics letters.

[61]  R. A. Becker,et al.  Comparison of guided‐wave interferometric modulators fabricated on LiNbO3 via Ti indiffusion and proton exchange , 1983 .

[62]  Feng Chen,et al.  Monomode optical waveguide in lithium niobate formed by MeV Si+ ion implantation , 2001 .

[63]  H. Taylor,et al.  Low‐loss strain induced optical waveguides in strontium barium niobate (Sr0.6Ba0.4Nb2O6) at 1.3 μm wavelength , 1995 .

[64]  Anne C. Tropper,et al.  Ion-implanted Nd:YAG planar waveguide laser , 1989 .

[65]  R. M. Montereali,et al.  Active waveguides produced in lithium fluoride by He+ implantation , 2005 .

[66]  P. J. Chandler,et al.  Second Harmonic Generation in Ion Implanted Lithium Niobate Planar Waveguides , 1994 .

[67]  P. Gunter,et al.  Second-harmonic generation in potassium niobate waveguides , 2000, IEEE Journal of Selected Topics in Quantum Electronics.

[68]  Optical Waveguide Formation in LiNbO3 by the 2.6 MeV Nickel Ions Implantation , 2001 .

[69]  T. E. Gier,et al.  KxRb1−xTiOPO4: A new nonlinear optical material , 1976 .

[70]  Gérard Destefanis,et al.  Optical waveguides in LiNbO3 formed by ion implantation of helium , 1978 .

[71]  P. D. Townsend,et al.  Formation of planar waveguides in bismuth germanate by 4He+ ion implantation , 1989 .

[72]  Markus Pollnau,et al.  Designable buried waveguides in sapphire by proton implantation , 2004 .

[73]  Lan Qi,et al.  The two-step creation and tunable laser operation of F+3 centers in LiF crystals , 1989 .

[74]  K. Polgár,et al.  Implanted waveguides in borate crystals (LTB, β-BBO, and LBO) for frequency conversion , 2001 .

[75]  Ke Liu,et al.  Proton beam writing of erbium-doped waveguide amplifiers , 2005 .

[76]  H. C. Chen,et al.  Planar optical waveguide in Cu-doped potassium sodium strontium barium niobate crystal formed by mega-electron-volt He-ion implantation. , 1997, Optics letters.

[77]  Eugenio Cantelar,et al.  Continuous-wave laser oscillation at 1.3μm in Nd:YAG proton-implanted planar waveguides , 2005 .

[78]  S. Field,et al.  Ion-implanted Nd:MgO:LiNbO(3) planar waveguide laser. , 1991, Optics letters.

[79]  G. V. Vázquez,et al.  Analysis of ion implanted waveguides formed on Nd:YVO4 crystals , 2004 .

[80]  Stefano Pelli,et al.  Optical waveguides produced in LiF by MeV ion beam bombardment , 2002 .

[81]  Feng Chen,et al.  Monomode optical waveguide excited at 1540 nm in LiNbO(3) formed by MeV carbon ion implantation at low doses. , 2004, Optics express.

[82]  P. Günter.  Electro-optical properties of KNbO3 , 1974 .

[83]  I. K. Naik.  Low‐loss integrated optical waveguides fabricated by nitrogen ion implantation , 1983 .

[84]  P. Moretti,et al.  Micro‐Raman study of defect structure and phonon spectrum of He‐implanted LiNbO3 waveguides , 2004 .

[85]  M. Segev,et al.  Discrete diffraction and spatial gap solitons in photovoltaic LiNbO3 waveguide arrays. , 2005, Optics express.

[86]  J. Krupa,et al.  Physics of laser crystals , 2003 .

[87]  Peter Günter,et al.  Cerenkov-type second-harmonic generation in KNbO/sub 3/ channel waveguides , 1996 .

[88]  H. Franke,et al.  Ion implantation, a method for fabricating light guides in polymers , 1988 .

[89]  I. Kaminow,et al.  Metal‐diffused optical waveguides in LiNbO3 , 1974 .

[90]  E. R. Schineller,et al.  Optical Waveguides Formed by Proton Irradiation of Fused Silica , 1968 .

[91]  Feng Chen,et al.  Monomode, nonleaky planar waveguides in a Nd3+-doped silicate glass produced by silicon ion implantation at low doses , 2002 .

[92]  Feng Chen,et al.  Fabrication of optical waveguides in KTiOAsO4 by He or Si ion implantation , 2004 .

[93]  T. Yamashiki,et al.  Low-loss waveguides of benzylidene-aniline derivatives by organic molecular beam heteroepitaxy. , 2003, Optics letters.

[94]  Mark E. Law,et al.  Ion beams in silicon processing and characterization , 1997 .

[95]  Feng Chen,et al.  Extraordinary refractive-index increase in MeV B3+ ion-implanted LiNbO3 waveguide , 2003 .

[96]  R. Morandotti,et al.  Optical discrete solitons in waveguide arrays. I. Soliton formation , 2002 .

[97]  Y. Uematsu.  Nonlinear Optical Properties of KNbO3 Single Crystal in the Orthorhombic Phase , 1974 .

[98]  W. Li,et al.  Property analysis of planar optical waveguide in NYAB formed by He+ ion implantation , 1997 .

[99]  Yu Wang,et al.  Formation of optical waveguide in KNSBN crystal by low dose MeV H-ion implantation , 1997 .

[100]  P. Moretti,et al.  Optical planar and channel waveguides in the new nonlinear crystal Ca4YO(BO3)3 (YCOB) fabricated by He+ implantation. , 2004, Applied optics.

[101]  F. Salin,et al.  A New Non-Linear and Neodymium Laser Self-Frequency Doubling Crystal with Congruent Melting: Ca4GdO(BO3)3 (GdCOB). , 2010 .

[102]  K. Polgár,et al.  Helium ion-implanted planar waveguide in Y-cut and Z-cut β-BBO (BaB2O4) , 2000 .

[103]  Roberta Ramponi,et al.  Dispersion of the ordinary refractive-index change in a proton-exchanged LiNbO3 waveguide , 2001 .

[104]  Ion‐Implanted Planar Optical Waveguides in Nd:MgO:LiNbO3 , 1997 .

[105]  Zhao Shuqing,et al.  Crystal growth and properties of lithium triborate , 1990 .

[106]  P. Townsend,et al.  Second harmonic generation from RE doped BGO waveguides , 2000 .

[107]  Zbigniew Opilski,et al.  Automation of setups for the measurement of refractive index distribution and attenuation in planar waveguides , 1997, Other Conferences.

[108]  Detlef Kip,et al.  All-optical beam deflection and switching in strontium-barium-niobate waveguides , 1998 .

[109]  M. Jazbinsek,et al.  OpticalWaveguides in Sn2P2S6 by low fluence MeV He+ ion implantation , 2006, 2006 Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference.

[110]  P. D. Townsend,et al.  Optical effects of ion implantation , 1987 .

[111]  François Salin,et al.  Linear- and nonlinear-optical properties of a new gadolinium calcium oxoborate crystal, Ca 4 GdO(BO 3 ) 3 , 1997 .

[112]  D. Kip,et al.  Interaction of spatial photorefractive solitons in a planar waveguide , 1999 .

[113]  P. Townsend,et al.  Ion beam luminescence of Nd:YAG , 2005 .

[114]  Feng Chen,et al.  Refractive index profiles in YCa4O(BO3)3 and Nd:YCa4O(BO3)3 waveguides created by MeV He ions , 2002 .

[115]  W. Heiland,et al.  Waveguides in KNbO3 by He+ implantation , 1988 .

[116]  Feng Chen,et al.  Planar waveguides in BiB3O6 and Nd:YVO4 crystals by ion implantation , 2002 .

[117]  E. Krätzig,et al.  Waveguides in Barium Titanate by Helium Implantation , 1990, January 16.

[118]  Emanuele Rimini,et al.  Ion implantation : basics to device fabrication , 1995 .

[119]  Rosa Maria Montereali,et al.  Visualization by SNOM technique of optical modes in LiF channel waveguides , 2005 .

[120]  P. Townsend,et al.  Ion implantation into heated soda-lime glass substrates , 1995 .

[121]  Michael I. Current,et al.  Ion implantation for silicon device manufacturing: A vacuum perspective , 1996 .

[122]  P. Townsend,et al.  Waveguide formation by He+ and H+ ion implantation in filter glass containing nanoparticles , 1997 .

[123]  R. Grunwald,et al.  Laser operation of epitaxially grown Yb:KLu(WO/sub 4/)/sub 2/--KLu(WO/sub 4/)/sub 2/ composites with monoclinic Crystalline structure , 2005, IEEE Journal of Quantum Electronics.

[124]  C. Mignotte.  Proton and helium implanted waveguides in pure and Nd-doped lithium tantalate , 2005 .

[125]  P. Günter,et al.  Radiation damage profiles of the refractive indices of He+ ion-implanted KNbO3 waveguides , 1997 .

[126]  A. Polman,et al.  Rapid thermal annealing of MeV erbium implanted LiNbO3 single crystals for optical doping , 1994 .

[127]  Low-energy proton irradiated waveguides in KTiOPO4 , 2001 .

[128]  Formation of a planar optical waveguide by mega-electron-volt He+ and P+ ions implanted in a BiB(3)O(6) crystal. , 2001, Optics letters.

[129]  Stegeman,et al.  Optical Spatial Solitons and Their Interactions: Universality and Diversity. , 1999, Science.

[130]  Robert G. Hunsperger,et al.  Integrated optics, theory and technology , 1982 .

[131]  Paolo Mazzoldi,et al.  Effect of low dose high energy O3+ implantation on refractive index and linear electro-optic properties in X-cut LiNbO3: Planar optical waveguide formation and characterization , 2002 .

[132]  Feng Chen,et al.  Planar waveguides in Ce:SBN and Cu:KNSBN crystals by 6.0 MeV B3+ ion implantation , 2002 .

[133]  Feng Chen,et al.  Property investigation of C+-ion-implanted LiNbO3 planar optical waveguides , 2005 .

[134]  Feng Chen,et al.  Optical channel waveguides in Nd:YVO4 crystal produced by O+ ion implantation , 2006 .

[135]  Ion implanted Nd:YAG waveguide lasers , 1991 .

[136]  F. Agullo-lopez,et al.  Generation of high-confinement step-like optical waveguides in LiNbO3 by swift heavy ion-beam irradiation , 2005 .

[137]  Yicheng Wu,et al.  The development of new NLO crystals in the borate series , 1990 .

[138]  P. Moretti,et al.  Measurements of the non-linear d33 coefficients of light-ion implanted lithium niobate by second harmonic generation in total reflection geometry , 2003 .

[139]  Feng Chen,et al.  Optical waveguide in X-cut LiNbO3 crystals by MeV P+ ion implantation with low dose , 2001 .

[140]  Bryan Kok Ann Ngoi,et al.  Virtual gray-scale mask for fabrication of micro-optical elements via focused ion beam direct writing , 2005 .

[141]  Werner Wesch,et al.  Silicon carbide: Synthesis and processing , 1996 .

[142]  A. Dazzi,et al.  Two-wave mixing at 854 nm in BaTiO3:Rh planar waveguide implanted with He+ , 2001 .

[143]  G. Stegeman,et al.  Demonstration of nonlinear prism coupling , 1984 .

[144]  Ranga Komanduri,et al.  Handbook of Ion Beam Processing Technology: Principles, Deposition, Film Modification and Synthesis , 1990 .

[145]  A. Polman,et al.  Erbium implanted thin film photonic materials , 1997 .

[146]  P. Günter,et al.  Nonleaky optical waveguides in KNbO3 by ultralow dose MeV He ion implantation , 1991 .

[147]  T. Opfermann,et al.  Radiation damage in KTiOPO4 by ion implantation of light elements , 2000 .

[148]  G. G. Bentini,et al.  Structural and compositional characterization of X-cut LiNbO3 crystals implanted with high energy oxygen and carbon ions , 2005 .

[149]  Feng Chen,et al.  Optical properties of stoichiometric LiNbO3 waveguides formed by low-dose oxygen ion implantation , 2005 .

[150]  C. Buchal,et al.  Two-wave mixing in photorefractive ion-implanted KNbO 3 planar waveguides at visible and near-infrared wavelengths. , 1993, Optics letters.

[151]  Feng Chen,et al.  Bi-layer optical waveguide formed by double boron ion implantation into strontium barium niobate crystal , 2005 .

[152]  Ginés Lifante,et al.  Integrated Photonics: Fundamentals , 2003 .

[153]  J. Albert,et al.  Characterization of planar optical waveguides by K(+)-ion exchange in glass. , 1985, Optics letters.

[154]  P. J. Chandler,et al.  A New Approach to the Determination of Planar Waveguide Profiles by Means of a Non-stationary Mode Index Calculation , 1986 .

[155]  W. C. Fricke.  Fundamental Mode YAG:Nd Laser Analysis. , 1970, Applied optics.

[156]  High dose MeV oxygen ion implantation into SiC , 1998 .

[157]  P. Peuser,et al.  Efficient, multiwatt, continuous-wave laser operation on the (4)F((3/2))-(4)I((9/2)) transitions of Nd:YVO(4) and Nd:YAG. , 2000, Optics letters.

[158]  S. Najafi,et al.  Sol-gel glass waveguide and grating on silicon , 1998 .

[159]  R. Alferness,et al.  Efficient single-mode fiber to titanium diffused lithium niobate waveguide coupling for λ = 1.32 µm , 1982 .

[160]  P. Günter,et al.  Photorefractive effects and photocurrents in KNbO3: Fe , 1978 .

[161]  Feng Chen,et al.  MeV Ni+ ion-implanted planar waveguide in Nd:YVO4 crystal , 2002 .

[162]  R. M. Montereali,et al.  Photoluminescence of LiF crystal colored by a focused electron beam , 1992 .

[163]  R. D. Standley,et al.  B.S.T.J. briefs: Sputtered glass waveguide for integrated optical circuits , 1969 .

[164]  Feng Chen,et al.  Property studies of optical waveguide formed by MeV He+ ion implanted into Nd :NaY(WO4)2 crystal , 2001 .

[165]  J. Zavada,et al.  Proton, deuteron, and helium implantation into GaAs and LiNbO3 for waveguide fabrication , 1985 .

[166]  A. Dazzi,et al.  High performance of two-wave mixing in a BaTiO 3 waveguide realized by He + implantation , 1999 .

[167]  G. Stegeman,et al.  Nonlinear integrated optics , 1985 .

[168]  Proton implanted waveguides in LiNbO3, KNbO3 and BaTiO3 , 1992 .

[169]  M. Nikl,et al.  Realization and infrared to green upconversion luminescence in Er3+:YAlO3 ion-implanted optical waveguides , 2006 .

[170]  K. Polgár,et al.  Low-loss optical planar waveguides in Li2B4O7 crystal formed by He+ implantation , 2001 .

[171]  G. Montemezzani,et al.  Nonlinear optical coefficients and phase-matching conditions in Sn(2)P(2)S(6). , 2005, Optics express.

[172]  Feng Chen,et al.  Optical waveguides formed in Nd:YVO4 by MeV Si+ implantation , 2002 .

[173]  Enrico Nichelatti,et al.  Mode analysis in He+-implanted lithium fluoride planar waveguides , 2003 .

[174]  P. J. Chandler,et al.  Ion implanted waveguides in laser host materials , 1991 .

[175]  P. Günter,et al.  Blue‐light second‐harmonic generation in ion‐implanted KNbO3 channel waveguides of new design , 1996 .

[176]  P. Townsend,et al.  Improvements of ion implanted waveguides in Nd:YAG and LiNbO3 using pulsed laser anneals , 2002 .

[177]  W. Li,et al.  Waveguide laser film in erbium-doped KTiOPO4 by pulsed laser deposition , 1998 .

[178]  J. Ruske,et al.  Properties of buried waveguides produced by He-irradiation in KTP and Rb:KTP , 2004 .

[179]  Claire Gu,et al.  Applications of photorefractive materials in information storage, processing and communication , 2003 .

[180]  H. Ryssel.  Ion Implantation , 1986 .

[181]  P. Townsend,et al.  Optical rotation in a Bi4Ge3O12:RE surface modified by He-ion beam implantation , 1999 .

[182]  P. Günter,et al.  Linear and nonlinear optical properties of KNbO3 ridge waveguides , 1998 .

[183]  P. Moretti,et al.  Channel waveguides in Ca4GdO(BO3)3 fabricated by He+ implantation for blue-light generation. , 2003, Optics letters.

[184]  D. Kip,et al.  Permanent narrow-band reflection holograms for infrared light recorded in LiNbO3:Ti:Cu channel waveguides , 2001 .

[185]  J. Veselka,et al.  Proton exchange in LiNbO3 , 1983 .

[186]  Peter Günter,et al.  Optical strip waveguides in KNbO3 formed by He ion implantation , 1991 .

[187]  F Bruno,et al.  Plasma-enhanced chemical vapor deposition of low-loss SiON optical waveguides at 15-microm wavelength. , 1991, Applied optics.

[188]  P. Townsend,et al.  Second‐harmonic generation in ion‐implanted quartz planar waveguides , 1991 .

[189]  J. Ruske,et al.  Depth dependence of radiation damage in Li+-implanted KTiOPO4 , 2002 .

[190]  B. Garside,et al.  Low-loss GeO(2) optical waveguide fabrication using low deposition rate rf sputtering. , 1982, Applied optics.

[191]  F Lu,et al.  Extraordinary refractive-index increase in lithium niobate caused by low-dose ion implantation. , 2001, Applied optics.

[192]  W. Burns,et al.  Multiple fiber end fire coupling with single‐mode channel waveguides , 1978 .

[193]  G. Vázquez,et al.  Low dose carbon implanted waveguides in Nd:YAG. , 2003, Optics express.

[194]  Feng Chen,et al.  Refractive index profiles of MeV phosphor ion implanted planar waveguide in KTP , 2001 .

[195]  J. Huang,et al.  An inexpensive diode-pumped mode-locked Nd : YVO4 laser for nonlinear optical microscopy , 2000 .

[196]  P. Moretti,et al.  Formation of planar optical waveguides in the new nonlinear gadolinium calcium oxoborate, Ca(4)GdO(BO(3))(3), crystal by 2-MeV He(+) implantation. , 1998, Optics letters.

[197]  F. Micheron,et al.  Electrical Control of Fixation and Erasure of Holographic Patterns in Ferroelectric Materials , 1972 .

[198]  P. Günter,et al.  Low-temperature annealing of ion-implanted KNbO3 waveguides for second harmonic generation , 1995, 1994 Conference on Lasers and Electro-Optics Europe.

[199]  P. Moretti,et al.  Second harmonic generation in helium-implanted periodically poled lithium niobate planar waveguides , 2005 .

[200]  G. Vázquez,et al.  Optical waveguides in Nd:YAG by proton implantation , 2003 .

[201]  Feng Chen,et al.  Ion-implanted waveguides in Nd 3þ -doped silicate glass and Er 3þ /Yb 3þ co-doped phosphate glass , 2002 .

[202]  P. Moretti,et al.  Low-loss planar optical waveguides in strontium barium niobate crystals formed by ion-beam implantation. , 1995, Optics letters.

[203]  P. Moretti,et al.  Formation of planar optical waveguides in potassium titanyl phosphate by double implantation of protons , 2001 .

[204]  S. James,et al.  Photorefractive planar waveguides in BaTiO3 fabricated by ion-beam implantation. , 1992, Optics letters.

[205]  Feng Chen,et al.  Refractive index profiles of LiB3O5 waveguides formed by MeV He ion irradiation , 2002 .

[206]  Dafu Cui,et al.  Electrical and electro-optical properties of Ce-doped barium titanate thin films prepared by pulsed laser deposition , 1997 .

[207]  A. J. Houghton,et al.  Changes in the chemical stability of ion-implanted silica glass , 1976 .

[208]  Feng Chen,et al.  Refractive index profiles of planar optical waveguides in β-BBO produced by silicon ion implantation , 2004 .

[209]  Feng Chen,et al.  Planar optical waveguide fabricated by silicon ion implantation into AgGaS2 crystal , 2005 .

[210]  Feng Chen,et al.  Property study of Si+-ion-implanted Nd:YVO4 waveguides , 2002 .

[211]  P. Leech,et al.  Channel waveguides formed in fused silica and silica-on-silicon by Si, P and Ge ion implantation , 1996 .

[212]  I. V. Mitchell,et al.  Implant‐damage isolation of InP and InGaAsP , 1993 .

[213]  Double waveguide in NdLiP4O12 laser crystal formed by MeV He+ ion implantation , 2005 .

[214]  M. Takai,et al.  Optimization of Pt tip field emitter array fabricated using focused ion and electron beams , 2003 .

[215]  Tian‐Bing Xu,et al.  MeV fluorine ion implanted planar waveguide in KTiOPO4 , 1998 .

[216]  W. Sohler,et al.  Loss in low-finesse Ti:LiNbO3 optical waveguide resonators , 1985 .

[217]  P. Townsend,et al.  Laser processing of insulator surfaces , 1997 .

[218]  P. Günter,et al.  Mode propagation losses in He + ion-implanted KNbO 3 waveguides , 1998 .

[219]  D. Nikogosyan,et al.  Nonlinear Optical Crystals: A Complete Survey , 2005 .

[220]  Ke-ming Wang,et al.  Formation of waveguides by implantation of 3.0MeV Ni2 , 2004 .

[221]  P. J. Chandler,et al.  Planar and channel waveguide fabrication in LiB3O5 using MeV He+ ion implantation , 1996 .

[222]  Feng Chen,et al.  Waveguide formation in LiTaO3 and LiB3O5 by keV hydrogen ion implantation , 2001 .

[223]  Feng Chen,et al.  Property study on nickel ion implanted planar waveguide in KTiOAsO4 crystal , 2002 .

[224]  P. Dannberg,et al.  Ion beam processing of SiC for optical application , 1999 .

[225]  R Ulrich,et al.  Measurement of thin film parameters with a prism coupler. , 1973, Applied optics.

[226]  P. Moretti,et al.  The SHEW technique as a simple method to characterize the non-linear properties of crystals: investigation of helium implantation effects in LiNbO3 and KTiOPO4 , 2001 .

[227]  P. Moretti,et al.  Second-harmonic generation in He+-implanted gadolinium calcium oxoborate planar waveguides. , 1999, Optics letters.

[228]  P. J. Chandler,et al.  Thermal stability of ion implanted LiTaO3 and LiNbO3 optical waveguides , 1988 .

[229]  P. Günter,et al.  High gain two-wave mixing in H+-implanted photorefractive Fe:KNbO3 planar waveguides , 1995 .

[230]  R. Gutmann,et al.  Optical waveguides in KTa1−xNbxO3 produced by He ion implantation , 1991 .

[231]  Luis Arizmendi,et al.  Photonic applications of lithium niobate crystals , 2004 .

[232]  Henri P. Uranus,et al.  Reconstruction of refractive index profile of planar waveguide using inverse WKB method , 1999, International Symposium on Photonics and Applications.

[233]  Feng Chen,et al.  Refractive index profiles of ion implanted waveguides in thulium sodium yttrium tungstate , 2001 .

[234]  P. J. Chandler,et al.  Fabrication of planar optical waveguides in LiB/sub 3/O/sub 5/ by 2 MeV He/sup +/ ion implantation , 1993, IEEE Photonics Technology Letters.

[235]  LOSS MEASUREMENTS AND STOICHIOMETRIC DEPENDENCE OF TI AND O IMPLANTED LINBO3 WAVEGUIDES , 1997 .

[236]  Feng Chen,et al.  Planar optical waveguides in β-BaB2O4 produced by oxygen ion implantation at low doses , 2004 .

[237]  Feng Chen,et al.  Property studies of optical waveguide formed by 6.0 MeV carbon ion implantation into Nd:silicate glass , 2005 .

[238]  C Solcia,et al.  Nondestructive waveguide loss-measurement method using self-pumped phase conjugation for optimum end-fire coupling. , 1995, Optics letters.

[239]  H. Gall,et al.  Modeling planar leaky optical waveguides , 2003 .

[240]  P. Günter,et al.  Nondestructive method for the characterization of ion-implanted waveguides , 2005 .

[241]  E. Zolotoyabko,et al.  Structural modifications in He-implanted waveguide layers of LiNbO3 , 1996 .

[242]  P. Townsend.  Development of ion implantation for optical applications , 1998 .