Fabrication of Sub-100 nm Linewidth Grating Patterns Using Nanoimprint Lithography(Session A8 Nano-Lithography)(2004 Asia-Pasific Workshop on Fundamentals and Application of Advanced Semiconductor Devices (AWAD 2004))
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Ki-Dong Lee | Jin-Sung Kim | Joo-Do Park | Seh-Won Ahn | Joo-Do Park | Seh-Won Ahn | Jin-sung Kim | Kidong Lee