Micro-ring resonators fabricated by focused-ion-beam on SOI

We present the fabrication of high Q factor micro-ring resonators on SOI substrate by directly focused-ion-beam (FIB) milling. Micro-ring resonators with diameters of 10 μm and 80 μm are fabricated and their corresponding intrinsic Q factors are 4,000 and 130,000, respectively.

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