论文信息 - Impact of the NO Anneal on the Microscopic Structure and Chemical Composition of the Si‐Face 4H‐SiC/SiO2 Interface - 字舞流文

Impact of the NO Anneal on the Microscopic Structure and Chemical Composition of the Si‐Face 4H‐SiC/SiO2 Interface

G. Pobegen | T. Aichinger | P. Hadley | W. Grogger | R. Mészáros | E. Fisslthaler | C. Gspan | M. Dienstleder | G. Gruber