Inverted hemispherical mask colloidal lithography

This paper presents a cost-effective nanofabrication method for forming large area and high coverage two-dimensional metal nanostructures on flat and curved surfaces. This method starts with a periodic array of hemispherical dimples on polystyrene (PS) film prepared by colloidal lithography with a sacrificial layer of polyacrylic acid (PAA) underneath. After the removal of PAA in water solution, the PS layer is turned over and attached to the substrate to be patterned. An inverted hemispherical mask is formed after oxygen plasma etching. As the holes at the bottom are much larger than those on the surface, the mask is especially suitable for a standard lift-off process. Based on this mask, metal nano-disk and pair-disk arrays, as well as two-dimensional nanostructures on a curved surface, have been fabricated. Optical measurement shows that a surface plasmon resonance exists in a periodic disk array. This method is valuable for the fabrication of a magnifying metamaterial hyperlens in order to eliminate the limitation of optical diffraction.

[1]  S. Anantha Ramakrishna,et al.  Near-field lenses in two dimensions , 2002 .

[2]  G. Whitesides,et al.  Complex Optical Surfaces Formed by Replica Molding Against Elastomeric Masters , 1996, Science.

[3]  J. Rogers,et al.  Two-dimensional nanohybridization of gold nanorods and polystyrene colloids , 2009 .

[4]  J. Pendry,et al.  Perfect cylindrical lenses. , 2003, Optics express.

[5]  D. Choi,et al.  Nanoscopic Ordered Voids and Metal Caps by Controlled Trapping of Colloidal Particles at Polymeric Film Surfaces , 2008 .

[6]  Peng Jiang,et al.  Templated fabrication of sub-100 nm periodic nanostructures. , 2008, Chemical communications.

[7]  Jennifer S. Shumaker-Parry,et al.  Fabrication of Crescent‐Shaped Optical Antennas , 2005 .

[8]  Zhaowei Liu,et al.  Far-Field Optical Hyperlens Magnifying Sub-Diffraction-Limited Objects , 2007, Science.

[9]  H. Giesche.  Synthesis of monodispersed silica powders II. Controlled growth reaction and continuous production process , 1994 .

[10]  Sarah Kim,et al.  Nanomachining by colloidal lithography. , 2006, Small.

[11]  Michael Giersig,et al.  Fabrication of nanoscale rings, dots, and rods by combining shadow nanosphere lithography and annealed polystyrene nanosphere masks. , 2005, Small.

[12]  Julian Wright,et al.  Ultraflat Ternary Nanopatterns Fabricated Using Colloidal Lithography , 2006 .

[13]  M. McLachlan,et al.  Template-assisted growth of nominally cubic (100)-oriented three-dimensional crack-free photonic crystals. , 2005, Nano letters.

[14]  Seung‐Man Yang,et al.  Gold “Nanograils” with Tunable Dipolar Multiple Plasmon Resonances , 2009 .

[15]  H. Fredriksson,et al.  Hole–Mask Colloidal Lithography , 2007 .

[16]  M. Kreiter,et al.  Tuning resonances on crescent-shaped noble-metal nanoparticles , 2007 .

[17]  Rostislav Bukasov,et al.  Highly tunable infrared extinction properties of gold nanocrescents. , 2007, Nano letters.

[18]  R. V. Duyne,et al.  Nanosphere lithography: A materials general fabrication process for periodic particle array surfaces , 1995 .

[19]  Ursula Ebels,et al.  Large-scale, 2D arrays of magnetic nanoparticles , 2003 .

[20]  J. Zhu,et al.  Ultrahigh‐Density Arrays of Ferromagnetic Nanorings on Macroscopic Areas , 2004 .

[21]  Y Chen,et al.  Nanofabrication: Conventional and nonconventional methods , 2001, Electrophoresis.

[22]  Bai Yang,et al.  Ordered Silica Microspheres Unsymmetrically Coated with Ag Nanoparticles, and Ag‐Nanoparticle‐Doped Polymer Voids Fabricated by Microcontact Printing and Chemical Reduction , 2006 .

[23]  Ping Sheng,et al.  Two‐ and Three‐Dimensional Ordered Structures of Hollow Silver Spheres Prepared by Colloidal Crystal Templating , 2004 .

[24]  Harald Giessen,et al.  Periodic large-area metallic split-ring resonator metamaterial fabrication based on shadow nanosphere lithography , 2009, CLEO/Europe - EQEC 2009 - European Conference on Lasers and Electro-Optics and the European Quantum Electronics Conference.

[25]  P. Mulvaney,et al.  A Simple Route to Tunable Two‐Dimensional Arrays of Quantum Dots , 2005 .

[26]  W. Goedel,et al.  Preparation of Mesoscopic Gold Rings Using Particle Imprinted Templates , 2004 .

[27]  C. Sow,et al.  Fabrication of a Two-Dimensional Periodic Non-Close-Packed Array of Polystyrene Particles , 2004 .

[28]  H. Giesche.  Synthesis of monodispersed silica powders I. Particle properties and reaction kinetics , 1994 .

[29]  U. Fischer,et al.  Submicroscopic pattern replication with visible light , 1981 .

[30]  C. Haynes,et al.  Nanosphere Lithography: A Versatile Nanofabrication Tool for Studies of Size-Dependent Nanoparticle Optics , 2001 .

[31]  Mikael Käll,et al.  Optical Spectroscopy of Nanometric Holes in Thin Gold Films , 2004 .