论文信息 - Low temperature indium oxide gas sensors

Low temperature indium oxide gas sensors

InOx thin films were grown by dc magnetron sputtering. Structural and morphological investigations carried out by XRD and AFM showed a strong correlation between crystallinity, surface topology and ozone sensitivity. The electrical conductivity exhibited a large change of six orders of magnitude during the processes of photoreduction/oxidation. It was concluded that it is mainly the grain size variation that determines the sensitivity of InOx films against ozone. © 2006 Elsevier B.V. All rights reserved.

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