Microtechnology for space systems
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Siegfried W. Janson | D. Mayer | S. Amimoto | H. Helvajian | G. Smit | S. Feuerstein | H. Helvajian | G. Smit | S. Amimoto | S. Feuerstein | D. Mayer | S. Janson
[1] A. Reisman,et al. The Controlled Etching of Silicon in Catalyzed Ethylenediamine‐Pyrocatechol‐Water Solutions , 1979 .
[2] Mona E. Zaghloul,et al. Realizing suspended structures on chips fabricated by CMOS foundry processes through the MOSIS service , 1994 .
[3] Jeffrey B. Sampsell,et al. Digital micromirror device and its application to projection displays , 1994 .
[4] William W. Hansen,et al. Direct-write UV-laser microfabrication of 3D structures in lithium-aluminosilicate glass , 1997, Photonics West.
[5] R. Kelly,et al. Microelectronic ion sensors: A critical survey , 1985 .
[6] Wen Li,et al. Design, Analysis and Fabrication of a Vaporizing Liquid Micro-Thruster , 1997 .
[7] M. Koudelka. Performance Characteristics of a Planar Clark-Type Oxygen Sensor , 1986 .
[8] A. Peczalski,et al. Analysis of noise margin and speed of GaAs MESFET DCFL using UM-SPICE , 1986, IEEE Transactions on Electron Devices.
[9] Steve Oleson,et al. Chemical Microthruster Options , 1996 .
[10] J. Meindl,et al. Optimization of the Hydrazine‐Water Solution for Anisotropic Etching of Silicon in Integrated Circuit Technology , 1975 .
[11] John C. Owicki,et al. Silicon micromachining in the fabrication of biosensors using living cells , 1990, IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop.
[12] K. Bean,et al. Anisotropic etching of silicon , 1978, IEEE Transactions on Electron Devices.
[13] Juergen Mueller. Thruster Options for Microspacecraft : A Review and Evaluation of Existing Hardware and Emerging Technologies , 1997 .
[14] Raj B. Apte,et al. DEFORMABLE GRATING LIGHT VALVES FOR HIGH RESOLUTION DISPLAYS , 1999 .
[15] Henry Helvajian,et al. Big benefits from tiny technologies: micro-nanotechnology applications in future space systems , 1997, Optics + Photonics.
[17] W. Ko,et al. A study on deep etching of silicon using ethylene-diamine-pyrocatechol-water , 1986 .
[18] D. B. Lee. Anisotropic Etching of Silicon , 1969 .
[19] Masayoshi Esashi,et al. Normally close microvalve and micropump fabricated on a silicon wafer , 1989, IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'.
[20] K. Wise,et al. A silicon-thermopile-based infrared sensing array for use in automated manufacturing , 1986, IEEE Transactions on Electron Devices.
[21] Kenneth S. Breuer,et al. A performance evaluation of MEMS-based micronozzles , 1997 .
[22] K. J. Gabriel,et al. Micro gears and turbines etched from silicon , 1987 .
[23] Juergen Mueller,et al. Thruster Optins for Microspacecraft: A Review and Evaluation of Existing Hardware and Emerging Technologies , 1997 .
[24] M. W. Putty. A Maicromachined vibrating ring gyroscope , 1994 .