Porous Organosilicates for On-Chip Dielectric Applications
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D. Y. Yoon | R. Cook | J. Hedrick | M. Sherwood | C. Hawker | R. Beyers | E. Liniger | K. Carter | C. Nguyen | W. Volksen | J. Remenar | R. D. Miller | M. Trollsås | V. Y. Lee | M. Harbison