Reactive sputtering of YBaCuO thin films on polycrystalline zirconia substrates: optimization results

In situ elaboration of YBaCuO thin films, on polycrystalline yttria doped zirconia substrates, has been optimized. A reactive sputtering model has been developed and the electrical conductivity of the substrate has been studied as a function of temperature and doping. The J c value of at 77 K, measured on microbridges, is among the best reported in the literature for this substrate type.