HIGH FREQUENCY

A high frequency resonant torsional microscanner actuated with thin film PZT is modeled, fabricated, and characterized. Sinusoidal actuation with 24 V at a mechanical resonance frequency of 39870 Hz provides a total optical scan angle of 38.5 deg. for the 1.4 mm wide mirror. It provides significant power and size advantages compared to electromagnetically and electrostatically actuated scanners. This scanner is a significant step towards achieving full HD resolution with mobile laser projectors.

[1]  Hakan Urey,et al.  Optical performance requirements for MEMS-scanner-based microdisplays , 2000, SPIE MOEMS-MEMS.

[2]  M. Menu,et al.  Effects of lens aberrations in some experiments of speckle interferometry , 1979 .

[3]  Harumichi Sato,et al.  High-speed metal-based optical microscanners using stainless-steel substrate and piezoelectric thick films prepared by aerosol deposition method , 2007 .

[4]  Young-Chul Ko,et al.  Eye-type scanning mirror with dual vertical combs for laser display , 2006 .

[5]  Yunfei Ma,et al.  Evolution of MEMS scanning mirrors for laser projection in compact consumer electronics , 2010, MOEMS-MEMS.

[6]  Christian Kaufmann,et al.  A novel 24-kHz resonant scanner for high-resolution laser display , 2005, SPIE MOEMS-MEMS.

[7]  Hakan Urey,et al.  Comb-Actuated Resonant Torsional Microscanner With Mechanical Amplification , 2010, Journal of Microelectromechanical Systems.

[8]  A. Yalçinkaya,et al.  Two-axis electromagnetic microscanner for high resolution displays , 2006, Journal of Microelectromechanical Systems.

[9]  W. Piyawattanametha,et al.  Two-Dimensional MEMS Scanner for Dual-Axes Confocal Microscopy , 2007, Journal of Microelectromechanical Systems.

[10]  Hakan Urey,et al.  Torsional MEMS scanner design for high-resolution display systems , 2002 .

[11]  H. Toshiyoshi,et al.  MEMS-actuated photonic crystal switches , 2006, IEEE Photonics Technology Letters.

[12]  Harald Schenk,et al.  Fabrication and characterization of a dynamically flat high resolution micro-scanner , 2008 .

[13]  Chang-Hyeon Ji,et al.  An electrostatic scanning micromirror with diaphragm mirror plate and diamond-shaped reinforcement frame , 2006 .

[14]  A. A. Kuijpersa,et al.  Towards embedded control for resonant scanning MEMS micromirror , 2009 .

[15]  H. Kotera,et al.  Metal-based piezoelectric MEMS scanner mirrors composed of PZT thin films on titanium substrates , 2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.

[16]  Hakan Urey,et al.  A high-frequency comb-actuated resonant MEMS scanner for microdisplays , 2011, 16th International Conference on Optical MEMS and Nanophotonics.

[17]  H. Toshiyoshi,et al.  Design and fabrication of a MEMS 1-D optical scanner using self-assembled vertical combs and scan-angle magnifying mechanism , 2005, IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2005..

[18]  Hakan Urey,et al.  Torsional MEMS scanner design for high-resolution scanning display systems , 2002, SPIE Optics + Photonics.

[19]  Hakan Urey,et al.  Performance of a biaxial MEMS-based scanner for microdisplay applications , 2000, SPIE MOEMS-MEMS.

[20]  Paul Muralt,et al.  Growth and properties of gradient free sol-gel lead zirconate titanate thin films , 2007 .

[21]  Yong-hwa Park,et al.  Electrostatic 1D microscanner with vertical combs for HD resolution display , 2007, SPIE MOEMS-MEMS.

[22]  Takashi Sugawara,et al.  High‐Speed and Wide‐Angle Deflection Optical MEMS Scanner Using Piezoelectric Actuation , 2010 .