Effect of hydrogen on the low-temperature growth of polycrystalline silicon film deposited by SiCl4/H2
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R. Yao | Wen-Hsien Huang | Rui Huang | Xuanying Lin | Yun-peng Yu | K. Lin | Zusong Zhu | Junhong Wei | Kui-xun Lin | Xuan-ying Lin | R. Huang