Automatic Tool Changer for SPMs

Our research encompasses improvements in SPM instrumentation needed for rapid automated change of nano- working tools like cantilever chips or grippers in the immediate region of SEM or FIB field of view. The major challenges are utmost precision working-tool positioning, repeatable clamping of the tool and placing the working-part in the same point after tool's change, and devising a design which will not incapacitate SEM or FIB for work. The communication presents an entirely new approach with the promise to meet these demands.