Deformations in Ti-diffused proton-exchanged x-cut LiNbO3 waveguide layers

In this study the analysis of deformation and mode refractive index measurements of H:Ti:LiNbO3 layers have been investigated. The variations of the lattice parameter in doped layer have been controlled by high-resolution X-ray diffraction measurements. It has been shown that the presence of Ti greatly impacts on crystal lattice deformation induced by subsequent doping by hydrogen. The stability of H:Ti:LiNbO3 waveguides has been investigated by the high temperature phase freezing by quenching and relaxation to equilibrium phase at room temperature. The variation of the lattice parameter in H:Ti:LiNbO3 layer appears to be smaller then that in H:LiNbO3 layer formed at the same conditions.